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Electromagnetically actuated micromachined flap

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B44C-001/22
출원번호 US-0377018 (1995-01-20)
발명자 / 주소
  • Ho Chih-Ming (Rancho Palos Verdes CA) Miu Denny K. (Valencia CA) Leu Jeremy Tzong-Shyng (Plainsboro NJ) Miller Raanan (Pasadena CA) Desai Amish (Pasadena CA) Liu Chang (Pasadena CA) Tsao Tom (Pasaden
출원인 / 주소
  • The Regents of the University of California (Oakland CA 02) California Institute of Technology (Pasadena CA 02)
인용정보 피인용 횟수 : 123  인용 특허 : 9

초록

A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic

대표청구항

An improvement in a method of fabricating a microelectromagnetic magnetic actuator, said improvement comprising: providing a substantially completed microelectromechanical magnetic actuator on a sacrificial layer disposed on an underlying substrate; removing said sacrificial layer upon which said mi

이 특허에 인용된 특허 (9)

  1. Phillips Douglas J. (Melbourne FL) Kessler Keith E. (Palm Bay FL) Shipley John W. (Palm Bay FL) Hyland Dave (Melbourne Beach FL), Linear precision actuator with accelerometer feedback.
  2. Guckel Henry (Madison WI) Christenson Todd R. (Madison WI) Skrobis Kenneth J. (Madison WI), Method of manufacturing micromechanical devices.
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  4. Sakakibara Takahisa (Moriguchi JPX) Izu Hiroaki (Moriguchi JPX) Kiyama Seiichi (Moriguchi JPX) Hirano Hitoshi (Moriguchi JPX) Kuramoto Keiichi (Moriguchi JPX) Domoto Yoichi (Moriguchi JPX) Hosokawa H, Micromachines.
  5. Ghezzo Mario (Ballston Lake NY) Saia Richard J. (Schenectady NY) Bagepalli Bharat S. (Schenectady NY) Imam Imdad (Schenectady NY) Polla Dennis L. (Brooklyn Park ; MN), Micromachining methods for making micromechanical moving structures including multiple contact switching system.
  6. Bosch Dieter (Mnchen DEX) Seidel Helmut (Starnbert DEX) Mck Gunter (Holzkirchen DEX), Micromechanical actuator.
  7. Muller Richard S. (Kensington CA) Fan Longsheng (Berkeley CA) Tai Yu C. (Albany CA), Micromechanical elements and methods for their fabrication.
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  9. Sickafus Edward N. (Grosse Ile MI), Planar micro-motor and method of fabrication.

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