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Thin layer composite unimorph ferroelectric driver and sensor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/22
출원번호 US-0416598 (1995-04-04)
발명자 / 주소
  • Hellbaum Richard F. (Hampton VA) Bryant Robert G. (Poquoson VA) Fox Robert L. (Hayes VA)
출원인 / 주소
  • The United States of America as represented by the Administrator of the National Aeronautics and Space Administration (Washington DC 06)
인용정보 피인용 횟수 : 126  인용 특허 : 1

초록

A method for forming ferroelectric wafers is provided. A prestress layer is placed on the desired mold. A ferroelectric wafer is placed on top of the prestress layer. The layers are heated and then cooled, causing the ferroelectric wafer to become prestressed. The prestress layer may include reinfor

대표청구항

A method for producing ferroelectric devices, comprising: selecting a mold for the device; placing a prestress layer on the mold; placing a ferroelectric layer on the prestress layer to create layer structure; heating the prestress and ferroelectric layers; and cooling the prestress and ferroelectri

이 특허에 인용된 특허 (1)

  1. Saito Koetsu (Tokyo JPX) Kawabuchi Masami (Yokohama JPX), Ultrasonic probe and method of manufacturing the same.

이 특허를 인용한 특허 (126)

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