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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Thin layer composite unimorph ferroelectric driver and sensor

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) H01L-041/22   
미국특허분류(USC) 156/245 ; ; 29/2535 ; 156/160 ; 310/311
출원번호 US-0416598 (1995-04-04)
발명자 / 주소
  • Hellbaum Richard F. (Hampton VA) Bryant Robert G. (Poquoson VA) Fox Robert L. (Hayes VA)
출원인 / 주소
  • The United States of America as represented by the Administrator of the National Aeronautics and Space Administration (Washington DC 06)
인용정보 피인용 횟수 : 126  인용 특허 : 1
초록

A method for forming ferroelectric wafers is provided. A prestress layer is placed on the desired mold. A ferroelectric wafer is placed on top of the prestress layer. The layers are heated and then cooled, causing the ferroelectric wafer to become prestressed. The prestress layer may include reinforcing material and the ferroelectric wafer may include electrodes or electrode layers may be placed on either side of the ferroelectric layer. Wafers produced using this method have greatly improved output motion.

대표
청구항

A method for producing ferroelectric devices, comprising: selecting a mold for the device; placing a prestress layer on the mold; placing a ferroelectric layer on the prestress layer to create layer structure; heating the prestress and ferroelectric layers; and cooling the prestress and ferroelectric layers whereby the heating and cooling steps induce a prestress into the layered structure.

인용문헌 (1)

  1. Saito Koetsu (Tokyo JPX) Kawabuchi Masami (Yokohama JPX), Ultrasonic probe and method of manufacturing the same.

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