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Apparatus for detecting and aligning a substrate 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-047/24
출원번호 US-0389226 (1995-02-15)
우선권정보 JP-0222128 (1992-07-29); JP-0061253 (1993-02-26); JP-0061295 (1993-02-26); JP-0061400 (1993-02-26); JP-0040375 (1994-02-15)
발명자 / 주소
  • Hiroki Tutomu (Yamanashi-ken JPX) Abe Shoichi (Kofu JPX) Akiyama Kiyotaka (Kofu JPX) Satoyoshi Tsutomu (Niraski JPX)
출원인 / 주소
  • Tokyo Electron Limited (Tokyo JPX 03) Tokyo Electron Yamanashi Limited (Nirasaki JPX 03) TEL Engineering Limited (Nirasaki JPX 03)
인용정보 피인용 횟수 : 43  인용 특허 : 11

초록

An apparatus according to the present invention includes a cassette in which a plurality of substrates are stored, a contact guide member provided to face a side surface of the cassette, and pressing end surfaces of substrates stored in the cassette, an alignment device for moving the contact guide

대표청구항

An apparatus for detecting and aligning a plurality of substantially transparent and rectangular glass substrates comprising four transverse end surfaces and used for liquid crystal display, the apparatus comprising: a cassette in which said plurality of substrates are stored; a plurality of contact

이 특허에 인용된 특허 (11)

  1. Lin Gaille (1515 Flintwood Dr. Dallas TX 75081), Low particle wafer automatic flat aligner.
  2. Kumagai Hiromi (Tokyo JPX), Semiconductor manufacturing apparatus with a spare vacuum chamber.
  3. Powers Lyle R. (Boulder CO) Crill Rikk (Longmont CO), Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation.
  4. Foley Michael S. (Beverly MA), Substrate handling system.
  5. Blackwood Robert S. (Lubbock TX) Vaughn David R. (Lubbock TX) Masten Billy R. (Shallowater TX) Vaughn Timothy B. (Lubbock TX), Substrate location and detection apparatus.
  6. Hiroki Tsutomu (Yamanashi JPX) Asakawa Teruo (Yamanashi JPX), Transfer device for transferring a substrate.
  7. Hiroki Tutomu (Yamanashi JPX), Vacuum processing apparatus.
  8. Hiroki Tutomu (Yamanashi JPX), Vacuum processing apparatus.
  9. Hine Derek L. (5 Hawk View Portola Valley CA 94025), Wafer alignment and transport mechanism.
  10. Ishii Katsumi (Kanagawa JPX) Takikawa Masao (Sagamihara JPX), Wafer container and wafer aligning apparatus.
  11. Tateyama Kiyohisa (Kumamoto JPX) Sakamoto Yasuhiro (Kumamoto JPX), Wafer conveyor apparatus and method for detecting inclination of wafer inside cassette.

이 특허를 인용한 특허 (43)

  1. Kobayashi, Ikunori, Apparatus and method for fabricating organic light emitting diode display device.
  2. Sung-Joon Byun KR; Jong-Beom An KR; Sung-Cue Choi KR, Apparatus and method for unloading substrates.
  3. Schauer, Ronald Vern; Lappen, Alan Rick, Apparatus for alignment of automated workpiece handling systems.
  4. Sato Shuzo,JPX ; Otorii Hiizu,JPX ; Suematsu Nobuo,JPX, Apparatus for correcting and holding front surface of sheet.
  5. Miyano,Ken; Murayama,Takahiko; Nakao,Takashi; Akiyama,Shuji, Automated guided vehicle.
  6. van der Meulen, Peter, Batch wafer alignment.
  7. van der Meulen, Peter, Bypass thermal adjuster for vacuum semiconductor processing.
  8. Teng,Kuo Hsing; Lo,Fu Shun; Tsai,Yi Chang, Calibration cassette pod for robot teaching and method of using.
  9. Beloussov, Alexandre V.; Baumann, Michael A.; Olsen, Howard B.; Salem, Dana, Configuration management and retrieval system for proton beam therapy system.
  10. Joseph T. Adams ; Robert S. Kearns, Edge gripped substrate lift mechanism.
  11. Joseph T. Adams ; Robert S. Kearns, Edge gripped substrate loading and unloading method.
  12. Hanon Miles T. ; Kent David M., Method and apparatus for detecting cross-slotted objects.
  13. Dopfer, Peter; Demmeler, Erwin; Dicklberger, Oskar; Hildebrandt, Thomas, Method and apparatus for processing value documents.
  14. Elliott, Martin R.; Shah, Vinay, Methods and apparatus for mapping carrier contents.
  15. Lofaro, Michael F., Multi-generational carrier platform.
  16. Liu, Kang Ting, Orientation inspector for liquid crystal display (LCD) cell.
  17. Hosaka,Hiroki, Pair of stage arms for a semiconductor wafer delivery apparatus.
  18. Iwai, Tetsuhiro, Plasma processing apparatus and plasma processing method.
  19. Tanaka, Akira; Kishi, Takashi, Power supply apparatus for supplying electric power to substrate carrier container.
  20. Ozawa, Jun; Takahashi, Gaku, Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus.
  21. Choi, Lee-Ho, Rack for supporting liquid crystal display devices.
  22. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D., Semiconductor manufacturing process module.
  23. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D., Semiconductor manufacturing process modules.
  24. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D., Semiconductor manufacturing process modules.
  25. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D., Semiconductor manufacturing process modules.
  26. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D., Semiconductor manufacturing process modules.
  27. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D., Semiconductor manufacturing process modules.
  28. van der Meulen, Peter, Semiconductor manufacturing systems.
  29. Hosaka,Hiroki, Semiconductor wafer delivery apparatus.
  30. Hosaka,Hiroki, Semiconductor wafer delivery apparatus.
  31. Hosaka,Hiroki, Semiconductor wafer delivery apparatus.
  32. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling and transport.
  33. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling and transport.
  34. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling and transport.
  35. van der Meulen, Peter; Kiley, Christopher C.; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling transport.
  36. Hosaka,Hiroki, Stage arm for a semiconductor wafer delivery apparatus.
  37. Choi,Lee Ho, Structure for racking substrates.
  38. Goto,Hirohiko; Oda,Shiro, Substrate holding device.
  39. Kurita, Shinichi; Blonigan, Wendell T.; Anwar, Suhail; Kiyotake, Toshio; Nguyen, Hung T., Substrate support.
  40. Hashimoto, Yasuhiko, Substrate transfer robot and substrate transfer system.
  41. Nozaki, Junichi, Substrate transport method.
  42. Rivollier, Frederic; Chubb, Ryan, Systems and methods for handling wafers.
  43. Kenichi Yamaga JP; Yuji Ono JP; Masahiro Miyashita JP; Osamu Tanigawa JP, Wafer processing apparatus, method of operating the same and wafer detecting system.
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