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Apparatus for measuring reflected light utilizing spherically arranged optical fibers

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-021/55
  • G01B-009/10
  • G02B-006/04
출원번호 US-0488367 (1995-06-07)
발명자 / 주소
  • Castonguay Raymond Joseph (Tucson AZ)
출원인 / 주소
  • Breault Research Organization (Tucson AZ 02)
인용정보 피인용 횟수 : 23  인용 특허 : 14

초록

A portable scatterometer and/or an angular radiated light measurement instrument that uses a measurement head which includes a double tapered fiber optic bundle with a concave front face to simultaneously collect partial or full hemispherically scattered light reflected from a point on a surface ill

대표청구항

Apparatus for measuring light reflected from a point on a surface comprising: a housing, a laser diode light source for illuminating the point and supported within the housing, a tapered fiber optic bundle supported within the housing and having a plurality of optical fibers one end of each of which

이 특허에 인용된 특허 (14)

  1. Del Signore ; II ; James R., Ambient light compensating circuit.
  2. Harootian ; Jr. Simon G. (Worcester MA), Anamorphic fused fiber optic bundle.
  3. Castonguay Raymond J. (Tucson AZ), Apparatus and method of rapidly measuring hemispherical scattered or radiated light.
  4. Carroll Arthur B. (Georgetown TX) Carstedt John K. (Round Rock TX), Early fault detection in an opto-matrix touch input device.
  5. Geary Joseph M. (Las Cruces NM) Hull-Allen Charles G. (Jupiter FL), Fiber optic scatterometer for measuring optical surface roughness.
  6. Jeskey Richard V. (Fiskdale MA), Focusable display screen.
  7. Hegg Ronald G. (Inglewood CA), High-contrast fiber optic diffusion faceplate with radiused fibers.
  8. Reisser Helmut (Rosenstrasse 6 D-8026 Ebenhausen DEX), Instrument for determining visual surface properties.
  9. Bates Richard D. (Ann Arbor MI), Method and apparatus for self-biasing a light beam obstacle detector with a bias light.
  10. Schneiter John L. (Latham NY), Optical fiber based sensor for a variable depth range camera.
  11. Halldorsson Thorstein (Munich DEX) Altmann Konrad (Munich DEX) Seiffarth Ernst-August (Taufkirchen DEX), Optical wide angle sensor head.
  12. Castonguay Raymond J. (Tucson AZ), Process of reconstructing a single data profile of rapidly measured hemispherical scattered or radiated light.
  13. Blau David (Cupertino CA), Self-checking light curtain system and method of operation.
  14. Carroll Arthur B. (St. Joseph IL) Lazarevich Vladeta D. (Bondville IL) Gardner Mark R. (Champaign IL), Touch panel with ambient light sampling.

이 특허를 인용한 특허 (23)

  1. Bruce,Richard H.; Curry,Douglas N.; Krivacic,Robert T.; Hsieh,Huangpin B., Apparatus and method for detecting and locating rare cells.
  2. Walton Ian D. ; Trulson Mark O. ; Rava Richard P., Apparatus and method for detecting samples labeled with material having strong light scattering properties, using reflection mode light and diffuse scattering.
  3. Ben-Dove Shimshon,ILX ; Fridhendler Michael,ILX ; Lanzet Igal,ILX ; Kuperman Igor,ILX, Apparatus and method for optically measuring an object surface contour.
  4. Yamamoto,Akihito; Nakao,Takashi; Mikata,Yuuichi; Tsunashima,Yoshitaka, Cleaning method for a semiconductor device manufacturing apparatus.
  5. Curry,Douglas N., Imaging apparatus and method employing a large linear aperture.
  6. Blumenfeld,Martin; Sanders,Mark A.; Talghader,Joseph J.; Grenz,Jesse R., Imaging of biological samples using electronic light detector.
  7. Webbeking,Victor; Main,Karen; Kepferle,Loyd; Wilson,Larry Wendell, Instrument and method to measure available light energy for photosynthesis.
  8. Raymond, Christopher, Line profile asymmetry measurement.
  9. Raymond, Christopher, Line profile asymmetry measurement.
  10. Raymond, Christopher J., Line profile asymmetry measurement using scatterometry.
  11. Nisper, Jon Kenneth; Richardson, Thomas M.; Ellens, Marc S.; Huang, Changbo, Method and system for enhanced formulation and visualization rendering.
  12. Curry,Douglas N.; Bruce,Richard H.; Krivacic,Robert T.; Hsieh,Huangpin B.; Lerner,Richard A., Method of converting rare cell scanner image coordinates to microscope coordinates using reticle marks on a sample media.
  13. Curry,Douglas N.; Bruce,Richard H.; Krivacic,Robert T., Method of scanning and light collection for a rare cell detector.
  14. Szwaykowski, Piotr; Castonguay, Raymond J., Methods for determining error in an interferometry system.
  15. Shimaoka, Fumiaki; Sato, Takeshi; Konishi, Hiroshi; Inoue, Takashi, Paper sheet recognition apparatus, light guide and light guide casing for use in spectrometric measurement of paper sheet.
  16. Beraldin J. Angelo,CAX ; Blais Francois,CAX ; Rioux Marc,CAX ; Domey Jacques,CAX, Position sensitive light spot detector.
  17. Broersma, Harmen, Reflectometer.
  18. Yamamoto,Akihito; Nakao,Takashi; Mikata,Yuuichi; Tsunashima,Yoshitaka, Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, semiconductor device manufacturing system, and cleaning method for semiconductor device manufacturing apparatu.
  19. Castonguay,Raymond J., Spherical scattering-light device for simultaneous phase and intensity measurements.
  20. Gonzo,Lorenzo; Simoni,Andrea; Gottardi,Massimo; Beraldin,J. Angelo, System and method of light spot position and color detection.
  21. Kiani,Sepehr; Gessel,David Jacob; Wilson,Andrew, Systems and methods for inspecting an optical interface.
  22. Curry,Douglas N.; Bruce,Richard H., Time-multiplexed scanning light source for multi-probe, multi-laser fluorescence detection systems.
  23. Szwaykowski, Piotr, White light scanning interferometer with simultaneous phase-shifting module.
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