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Magnetic levitation conveyor apparatus

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-035/00
출원번호 US-0362451 (1995-03-07)
우선권정보 JP-0202989 (1992-07-07); JP-0206010 (1992-07-09); JP-0208472 (1992-07-13); JP-0210954 (1992-07-15); JP-0213624 (1992-07-18); JP-0228042 (1992-08-04); JP-0296405 (1992-10-08); JP-0304640 (1992-10-16); JP-0333
국제출원번호 PCT/JP93/00930 (1993-07-06)
§371/§102 date 19950307 (19950307)
국제공개번호 WO-9401354 (1994-01-20)
발명자 / 주소
  • Mori Satoshi (Kanagawa-ken JPX) Matsumura Masao (Kanagawa-ken JPX) Kanemitsu Yoichi (Kanagawa-ken JPX) Yoshioka Takeshi (Kanagawa-ken JPX) Kajiyama Masaaki (Kanagawa-ken JPX) Kondo Fumio (Kanagawa-ke
출원인 / 주소
  • Ebara Corporation (Tokyo JPX 03)
인용정보 피인용 횟수 : 62  인용 특허 : 0

초록

A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. Th

대표청구항

A magnetic levitation conveyor apparatus, comprising: a tunnel defined by a partition; a carriage movable in a levitated state through said tunnel for conveying a workpiece; levitation electromagnets having at least two rows of magnetic poles disposed on an upper portion of said partition of said tu

이 특허를 인용한 특허 (62)

  1. Yeo, Yeongjin; Choi, Seungheon; Lee, Geejo, Apparatus for transferring substrates.
  2. Evers,Marinus F. J.; Bri��r,Peter; Clijsen,Leonardus P M, Assembly for processing substrates.
  3. Maeda, Minoru; Muraguchi, Yosuke; Kosaki, Mamoru; Fujiwara, Takashi, Conveying apparatus.
  4. Choi, Young-Mook; Hong, Jong-Won, Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus.
  5. Riether, Christian, Dispatching device, sample distribution system and laboratory automation system.
  6. Hazelton Andrew J., Driving motors attached to a stage that are magnetically coupled through a chamber.
  7. Jung Norbert G ; Jung Elena, Electro-magnetic conveyor.
  8. Gregor, Mariusch; Reimer, Peter; Seidl, Vincent, Electromagnetically levitated substrate support.
  9. Holbrook, Russell W.; Williams, Daniel J., Item handling system with tracking.
  10. Riether, Christian, Laboratory cargo distribution system, laboratory automation system and method of operating a laboratory cargo distribution system.
  11. Denninger, Oliver; Heise, Michael; Schneider, Hans, Laboratory sample distribution system and corresponding method of operation.
  12. Heise, Michael; Schneider, Hans, Laboratory sample distribution system and corresponding method of operation.
  13. Malinowski, Michal, Laboratory sample distribution system and laboratory automation system.
  14. Malinowski, Michal; Sinz, Achim; Mueller, Florian, Laboratory sample distribution system and laboratory automation system.
  15. Pedain, Christoph, Laboratory sample distribution system and laboratory automation system.
  16. Riether, Christian, Laboratory sample distribution system and laboratory automation system.
  17. Schneider, Hans; Riether, Christian, Laboratory sample distribution system and laboratory automation system.
  18. Sinz, Achim, Laboratory sample distribution system and laboratory automation system.
  19. Sinz, Achim, Laboratory sample distribution system and laboratory automation system.
  20. Sinz, Achim, Laboratory sample distribution system and method for calibrating magnetic sensors.
  21. Heise, Michael; Schneider, Hans, Laboratory sample distribution system, laboratory system and method of operating.
  22. Heise, Michael; Schneider, Hans, Laboratory sample distribution system, laboratory system and method of operating.
  23. Heise, Michael; Schneider, Hans, Laboratory sample distribution system, laboratory system and method of operating.
  24. Hofmeister, Christopher; Caveney, Robert T., Linear substrate transport apparatus.
  25. Shinozaki, Hiroyuki, Magnetic bearing apparatus having a protective non-magnetic can.
  26. Snell Shannon D. ; Reisenauer Scott C. ; Baumberger Darin D. ; Block Rich E., Magnetic fanning accumulator.
  27. Orlo James Fiske, Magnetic levitation transportation system and method.
  28. Mahmudimanesh, Mohammadreza; Sinz, Achim, Method of configuring a laboratory automation system, laboratory sample distribution system and laboratory automation system.
  29. Sinz, Achim; Mahmudimanesh, Mohammadreza, Method of determining a handover position and laboratory automation system.
  30. Sinz, Achim; Mallikarjunaiah, Namitha; Pedain, Christoph, Method of operating a laboratory automation system and a laboratory automation system.
  31. Baer, Jonathan, Method of rotating a sample container carrier, laboratory sample distribution system and laboratory automation system.
  32. Sinz, Achim, Method of setting a handover position and laboratory automation system.
  33. Malinowski, Michal; Volz, Henny; Riether, Christian, Module for a laboratory sample distribution system, laboratory sample distribution system and laboratory automation system.
  34. Komori,Mochimitsu, Non-contact conveying device using superconducting magnetic levitation.
  35. Chang, Seok-Rak; Nam, Myeng-Woo; Kang, Hee-Cheol; Kim, Jong-Heon; Hong, Jong-Won; Chang, Uno, Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same.
  36. Chang, Seok-Rak; Nam, Myeng-Woo; Kang, Hee-Cheol; Kim, Jong-Heon; Hong, Jong-Won; Chang, Uno, Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same.
  37. Cunnane, Frank Patrick, Power generating hydroconveyor.
  38. Cunnane, Frank Patrick, Power generating hydroconveyor.
  39. Cunnane, Frank Patrick, Power generating hydroconveyor.
  40. Ragan, Bryant G., Radius conveyor with magnetic bearing.
  41. Hosek, Martin; Moura, Jairo Terra; Hofmeister, Christopher, Reduced-complexity self-bearing brushless DC motor.
  42. Riether, Christian, Sample distribution system and laboratory automation system.
  43. Riether, Christian; Sinz, Achim, Sample distribution system and laboratory automation system.
  44. Hofmeister, Christopher; Caveney, Robert T., Substrate processing apparatus.
  45. Hofmeister, Christopher; Caveney, Robert T., Substrate processing apparatus.
  46. Hofmeister, Christopher; Caveney, Robert T., Substrate processing apparatus.
  47. Hofmeister, Christopher; Caveney, Robert T., Substrate processing apparatus.
  48. Hofmeister, Christopher; Caveney, Robert T., Substrate processing apparatus.
  49. Hofmeister, Christopher; Caveney, Robert T., Substrate processing apparatus.
  50. Blonigan, Wendell T.; White, John M., Substrate transfer shuttle having a magnetic drive.
  51. Wendell T. Blonigan ; John M. White, Substrate transfer shuttle having a magnetic drive.
  52. Heise, Michael; Teodorescu, George, System for transporting containers between different stations and a container carrier.
  53. Heise, Michael; Teodorescu, George, System for transporting containers between different stations and a container carrier.
  54. Jo, Chang-Mog; Kim, Jong-Heon; Choi, Yong-Sup; Kim, Sang-Soo; Kang, Hee-Cheol; Choi, Young-Mook, Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same.
  55. Himori, Shinji; Kato, Takehiro; Ito, Etsuji, Transfer apparatus and plasma processing system.
  56. Baer, Jonathan, Transport carrier, laboratory cargo distribution system, and laboratory automation system.
  57. Riether, Christian, Transport device, sample distribution system and laboratory automation system.
  58. Riether, Christian; Sinz, Achim, Transport device, sample distribution system and laboratory automation system.
  59. Buehr, Fritz, Transport device, sample distribution system, and laboratory automation system.
  60. Bonora,Anthony C.; Gould,Richard H.; Hine,Roger G.; Krolak,Michael; Speasl,Jerry A., Universal modular wafer transport system.
  61. Riether, Christian; Schneider, Hans, Vertical conveying device, laboratory sample distribution system and laboratory automation system.
  62. Sekiya, Kazuma, Wafer processing system.
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