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Diamond composite films for protective coatings on metals and method of formation 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H05H-001/02
  • C23C-016/32
  • C23C-016/42
출원번호 US-0328947 (1994-10-25)
발명자 / 주소
  • Ong Tiong P. (Austin TX) Shing Yuh-han (Hsinchu TWX)
출원인 / 주소
  • The United States of America as represented by the Administrator of the National Aeronautics and Space Administration (Washington DC 06)
인용정보 피인용 횟수 : 53  인용 특허 : 0

초록 ▼

Composite films consisting of diamond crystallites and hard amorphous films such as diamond-like carbon, titanium nitride, and titanium oxide are provided as protective coatings for metal substrates against extremely harsh environments. A composite layer having diamond crystallites and a hard amorph

대표청구항 ▼

A method for forming a structure of multiple diamond crystallite composites on a metal or carbon substrate within an electron cyclotron resonance microwave plasma chemical vapor deposition chamber, the method comprising: a first step of reacting the substrate with silane and hydrogen to form a metal

이 특허를 인용한 특허 (53)

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  4. Dearnaley Geoffrey ; Lankford ; Jr. James, Application of diamond-like carbon coatings to cobalt-cemented tungsten carbide components.
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  29. Dearnaley Geoffrey ; Lankford ; Jr. James, Medical implants made of metal alloys bearing cohesive diamond like carbon coatings.
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  51. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
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  52. Welty,Richard P.; Brondum,Klaus; Richmond,Douglas S.; Jonte,Patrick B., Valve component with improved wear resistance.
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  53. Welty, Richard P.; Brondum, Klaus; Richmond, Douglas S.; Jonte, Patrick B., Valve component with multiple surface layers.
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