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Method of manufacturing a semiconductor device 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/336
출원번호 US-0334335 (1994-11-02)
우선권정보 JP-0301174 (1993-11-05); JP-0301176 (1993-11-05)
발명자 / 주소
  • Zhang Hongyong (Kanagawa JPX) Yamaguchi Naoaki (Kanagawa JPX) Takemura Yasuhiko (Kanagawa JPX)
출원인 / 주소
  • Semiconductor Energy Laboratory Co., Ltd. (Kanagawa JPX 03)
인용정보 피인용 횟수 : 270  인용 특허 : 0

초록

A method of manufacturing a semiconductor device comprises the steps of forming a first insulating film on a semiconductor layer, forming a gate electrode on the insulating film, pattering the first insulating film into a second insulating film so that a portion of the semiconductor layer is exposed

대표청구항

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor layer on an insulating surface; forming a first insulating film on said semiconductor layer; forming a gate electrode on said first insulating film; forming a first anodic oxide film on side surfaces of

이 특허를 인용한 특허 (270)

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  213. Yamazaki Shunpei,JPX ; Kusumoto Naoto,JPX ; Tanaka Koichiro,JPX, Semiconductor device having channel refractive index in first and second directions.
  214. Ohtani, Hisashi; Nakazawa, Misako; Murakami, Satoshi; Fujimoto, Etsuko, Semiconductor device having multi-layer wiring.
  215. Yamazaki, Shunpei; Teramoto, Satoshi, Semiconductor device having parallel thin film transistors.
  216. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device having pixel electrode and peripheral circuit.
  217. Koyama,Jun; Ohnuma,Hideto; Shionoiri,Yutaka; Nagao,Shou, Semiconductor device having pixels.
  218. Yamazaki, Shunpei; Teramoto, Satoshi, Semiconductor device having thin film transistor.
  219. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device including transistors with silicided impurity regions.
  220. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device including transistors with silicided impurity regions.
  221. Dairiki, Koji, Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method.
  222. Dairiki, Koji, Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method.
  223. Kimura, Hajime, Semiconductor device wherein a property of a first semiconductor layer is different from a property of a second semiconductor layer.
  224. Yamazaki, Shunpei; Miyanaga, Akiharu; Mitsuki, Toru; Ohtani, Hisashi, Semiconductor device with a semiconductor layer over a surface having a recess pitch no smaller than 0.3 microns.
  225. Hiroki Adachi JP; Shunpei Yamazaki JP, Semiconductor device with metal-oxide conductors.
  226. Yamazaki, Shunpei; Miyanaga, Akiharu; Mitsuki, Toru; Ohtani, Hisashi, Semiconductor device with rod like crystals and a recessed insulation layer.
  227. Shunpei Yamazaki JP; Hiroki Adachi JP, Semiconductor device, active matrix substrate, method of manufacturing the semiconductor device and method of manufacturing the active matrix substrate.
  228. Yamazaki, Shunpei; Tanaka, Koichiro, Semiconductor device, and method of forming the same.
  229. Yamazaki, Shunpei; Tanaka, Koichiro, Semiconductor device, and method of forming the same.
  230. Yamazaki, Shunpei; Tanaka, Koichiro, Semiconductor device, and method of forming the same.
  231. Shunpei Yamazaki JP, Semiconductor display device.
  232. Shunpei Yamazaki JP; Jun Koyama JP, Semiconductor display device and driving circuit therefor.
  233. Yamazaki, Shunpei; Koyama, Jun, Semiconductor display device and driving circuit therefor.
  234. Yamazaki, Shunpei; Koyama, Jun, Semiconductor display device and driving circuit therefor.
  235. Koyama, Jun; Osame, Mitsuaki; Azami, Munehiro, Semiconductor display device and method of driving the same.
  236. Shunpei Yamazaki JP; Jun Koyama JP, Semiconductor display device correcting system and correcting method of semiconductor display device.
  237. Yamazaki, Shunpei; Koyama, Jun, Semiconductor display device correcting system and correcting method of semiconductor display device.
  238. Koga, Masayuki, Semiconductor memory device.
  239. Yamazaki, Shunpei; Koyama, Jun; Miyanaga, Akiharu; Fukunaga, Takeshi, Semiconductor thin film and method of manufacturing the same and semiconductor device and method of manufacturing the same.
  240. Hisashi Ohtani JP; Shunpei Yamazaki JP; Jun Koyama JP; Yasushi Ogata JP; Akiharu Miyanaga JP, Semiconductor thin film and semiconductor device.
  241. Ohtani Hisashi,JPX ; Yamazaki Shunpei,JPX ; Koyama Jun,JPX ; Ogata Yasushi,JPX ; Miyanaga Akiharu,JPX, Semiconductor thin film and semiconductor device.
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  246. Azami, Munehiro; Osame, Mitsuaki; Shionoiri, Yutaka; Nagao, Shou, Serial-to-parallel conversion circuit, and semiconductor display device employing the same.
  247. Azami,Munehiro; Osame,Mitsuaki; Shionoiri,Yutaka; Nagao,Shou, Serial-to-parallel conversion circuit, and semiconductor display device employing the same.
  248. Azami,Munehiro; Osame,Mitsuaki; Shionoiri,Yutaka; Nagao,Shou, Serial-to-parallel conversion circuit, and semiconductor display device employing the same.
  249. Koyama, Jun; Osame, Mitsuaki; Ogata, Yasushi, Signal dividing circuit and semiconductor device.
  250. Koyama,Jun; Osame,Mitsuaki; Ogata,Yasushi, Signal dividing circuit and semiconductor device.
  251. Ramachandran,Balasubramanian; Ranish,Joseph Michael; Jallepally,Ravi; Ramamurthy,Sundar; Achutharaman,Raman; Haas,Brian; Hunter,Aaron, Tailored temperature uniformity.
  252. Sorabji, Khurshed; Lerner, Alexander; Ranish, Joseph; Hunter, Aaron; Adams, Bruce; Behdjat, Mehran; Ramanujam, Rajesh, Temperature measurement and control of wafer support in thermal processing chamber.
  253. Yamaguchi,Tetsuji; Isobe,Atsuo; Saito,Satoru, Thin film integrated circuit and method for manufacturing the same, CPU, memory, electronic card and electronic device.
  254. Yamazaki, Shunpei; Miyanaga, Akiharu; Koyama, Jun; Fukunaga, Takeshi, Thin film semiconductor device and its manufacturing method.
  255. Takahashi, Mitsuasa, Thin film semiconductor device and method for manufacturing same.
  256. Takahashi,Mitsuasa, Thin film semiconductor device and method for manufacturing same.
  257. Hata Akihiro,JPX ; Adachi Masahiro,JPX, Thin film transistor and fabrication process of the same.
  258. Xie, Zhenyu, Thin film transistor and method for manufacturing the same, array substrate including the thin film transistor and display device including the array substrate.
  259. Yamazaki, Shunpei; Koyama, Jun; Hayashi, Keisuke, Thin film transistor and method of manufacturing the same.
  260. Yamazaki, Shunpei; Koyama, Jun, Thin film transistor circuit and a semiconductor display device using the same.
  261. Yamazaki,Shunpei; Koyama,Jun, Thin film transistor display device with integral control circuitry.
  262. So, Woo Young; Yoo, Kyung Jin; Park, Sang Il, Thin film transistors with dual layered source/drain electrodes and manufacturing method thereof, and active matrix display device and manufacturing method thereof.
  263. Yamazaki, Shunpei; Koyama, Jun, Thin-film transistor circuit and a semiconductor display using the same.
  264. Yamazaki,Shunpei; Koyama,Jun, Thin-film transistor circuit and a semiconductor display using the same.
  265. Yamazaki,Shunpei; Koyama,Jun, Time and voltage gradation driven display device.
  266. Yamazaki, Shunpei; Miyanaga, Akiharu; Mitsuki, Toru; Ohtani, Hisashi, Uniform thin film semiconductor device.
  267. Ohtani, Hisashi; Yamazaki, Shunpei, Wiring line and manufacture process thereof and semiconductor device and manufacturing process thereof.
  268. Ohtani, Hisashi; Yamazaki, Shunpei, Wiring line and manufacture process thereof, and semiconductor device and manufacturing process thereof.
  269. Ohtani,Hisashi; Yamazaki,Shunpei, Wiring line and manufacture process thereof, and semiconductor device and manufacturing process thereof.
  270. Takayama, Toru; Sato, Keiji; Yamazaki, Shunpei, Wiring material, semiconductor device provided with a wiring using the wiring material and method of manufacturing thereof.
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