초록 ▼

An object (12) may be cleaned by CO2 reduced ESD by directing a first water mist (23) at a surface (14) of the object while imparting a relative motion between the object board and the mist to form a film of water on the object surface. As the relative motion is imparted between the board and the fi

An object (12) may be cleaned by CO2 reduced ESD by directing a first water mist (23) at a surface (14) of the object while imparting a relative motion between the object board and the mist to form a film of water on the object surface. As the relative motion is imparted between the board and the first mist (23), a second water mist (32) is injected into a stream (30) of solid CO2 particles (27) directed at the object surface downstream of the first mist. Water droplets in the second mist in the second mist combine with the CO2 particles to create carbonic acid that disassociates into charged ions that increase the conductivity of the water film, allowing for increased charge dissipation, thus reducing the incidence of ESD.

대표청구항 ▼

A method of cleaning an object, comprising the steps of: directing a first mist of water at the object at a first position while simultaneously imparting a first relative motion between the first water mist and the object so that the first water mist forms a substantially continuous film of water ac

A method of cleaning an object, comprising the steps of: directing a first mist of water at the object at a first position while simultaneously imparting a first relative motion between the first water mist and the object so that the first water mist forms a substantially continuous film of water across a first major surface of the object; forming a stream of solid carbon dioxide (CO2) particles; directing a second mist of water into the stream of solid CO2 particles to produce a combined stream of water mist and CO2 particles; and directing the combined stream of water mist and CO2 particles at the object at a second position while imparting a second relative motion between the combined stream and the object which motion is the same as the first relative motion imparted between the first mist and the object so that the object is displaced from said first position to said second position and the combined stream of water mist and CO2 particles contact the first major surface of said object having the substantially continuous film of water formed therein, said contact of CO2 particles substantially removing residue present on the first major surface of said object, thereby cleaning the object.