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Method for making heterojunction bipolar transistor with self-aligned retrograde emitter profile 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/265
출원번호 US-0346209 (1994-11-22)
발명자 / 주소
  • Ahlgren David (Wappingers Falls NY) Chu Jack (Long Island City NY) Revitz Martin (Poughkeepsie NY) Ronsheim Paul (Wappingers Falls NY) Saccamango Mary (Patterson NY) Sunderland David (Hopewell Juncti
출원인 / 주소
  • International Business Machines Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 55  인용 특허 : 0

초록

A high gain, high frequency transistor is formed having a combination of a moderately doped retrograde emitter and a collector which is formed by self-aligned implantation through an emitter opening window. This combination allows continued base width scaling and ensures high current capability yet

대표청구항

A method of making a transistor structure including an emitter-base heterojunction and a retrograde emitter including the steps of depositing a layer over a collector region, said layer including an emitter-base heterojunction having a concentration profile of at least one band gap determining alloy

이 특허를 인용한 특허 (55)

  1. Enicks, Darwin Gene; Carver, Damian, Bandgap and recombination engineered emitter layers for SiGe HBT performance optimization.
  2. Enicks,Darwin Gene; Carver,Damian, Bandgap engineered mono-crystalline silicon cap layers for SiGe HBT performance enhancement.
  3. Salmi, Abderrahmane, Bipolar device with silicon germanium (SiGe) base region.
  4. Kondo, Masao; Oda, Katsuya; Washio, Katsuyoshi, Bipolar transistor.
  5. Masao Kondo JP; Katsuya Oda JP; Katsuyoshi Washio JP, Bipolar transistor.
  6. Asai, Akira; Ohnishi, Teruhito; Takagi, Takeshi, Bipolar transistor and fabrication method thereof.
  7. Heinemann, Bernd; Ehwald, Karl-Ernst; Knoll, Dieter, Bipolar transistor and method for producing same.
  8. Karl-Ernst Ehwald DE; Bernd Tillack DE; Bernd Heinemann DE; Dieter Knoll DE; Dirk Wolansky DE, Bipolar transistor and method for producing same.
  9. Lachner,Rudolf, Bipolar transistor and method for producing the same.
  10. Asai, Akira; Ohnishi, Teruhito; Takagi, Takeshi, Bipolar transistor and method manufacture thereof.
  11. Khater,Marwan H.; Dunn,James S.; Harame,David L.; Joseph,Alvin J.; Liu,Qizhi; Pagette,Francois; St. Onge,Stephen A.; Stricker,Andreas D., Bipolar transistor having raised extrinsic base with selectable self-alignment and methods of forming same.
  12. Khater,Marwan H.; Dunn,James S.; Harame,David L.; Joseph,Alvin J.; Liu,Qizhi; Pagette,Francois; St. Onge,Stephen A.; Stricker,Andreas D., Bipolar transistor having raised extrinsic base with selectable self-alignment and methods of forming same.
  13. Matsuoka, Akio, Bipolar transistor including conductive first and second protection layers.
  14. Freeman, Gregory G.; Khater, Marwan H.; Pagette, Francois, Bipolar transistor self-alignment with raised extrinsic base extension and methods of forming same.
  15. Freeman, Gregory G.; Khater, Marwan H.; Pagette, Francois, Bipolar transistor self-alignment with raised extrinsic base extension and methods of forming same.
  16. Khater, Marwan H.; Pagette, Francois, Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide.
  17. Khater,Marwan H; Pagette,Francois, Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide.
  18. Freeman, Gregory G.; Greenberg, David R.; Jeng, Shwu-Jen, Dual sidewall spacer for a self-aligned extrinsic base in SiGe heterojunction bipolar transistors.
  19. Malladi, Ramana M.; Newton, Kim M., Flat response device structures for bipolar junction transistors.
  20. Ozkan, Cengiz S.; Salmi, Abderrahmane, Heterojunction bipolar transistor (HBT) fabrication using a selectively deposited silicon germanium (SiGe).
  21. Torvik, John Tarje; Pankove, Jacques Isaac, Heterojunction bipolar transistor containing at least one silicon carbide layer.
  22. Torvik, John Tarje; Pankove, Jacques Isaac, Heterojunction bipolar transistor containing at least one silicon carbide layer.
  23. Forbes Leonard ; Ahn Kie Y., Homojunction semiconductor devices with low barrier tunnel oxide contacts.
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  25. Chu, Jack Oon; Coolbaugh, Douglas Duane; Dunn, James Stuart; Greenberg, David R.; Harame, David L.; Jagannathan, Basanth; Johnson, Robb Allen; Lanzerotti, Louis D.; Schonenberg, Kathryn Turner; Wuthrich, Ryan Wayne, Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology.
  26. Chu, Jack Oon; Coolbaugh, Douglass Duane; Dunn, James Stuart; Greenberg, David R.; Harame, David L.; Jagannathan, Basanth; Johnson, Robb Allen; Lanzerotti, Louis D.; Schonenberg, Kathryn Turner; Wuth, Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology.
  27. Chu,Jack Oon; Coolbaugh,Douglas Duane; Dunn,James Stuart; Greenberg,David R.; Harame,David L.; Jagannathan,Basanth; Johnson,Robb Allen; Lanzerotti,Louis D.; Schonenberg,Kathryn Turner; Wuthrich,Ryan , Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology.
  28. Jack Oon Chu ; Douglas Duane Coolbaugh ; James Stuart Dunn ; David R. Greenberg ; David L. Harame ; Basanth Jagannathan ; Robb Allen Johnson ; Louis D. Lanzerotti ; Kathryn Turner Schonenberg, Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology.
  29. Wilson, Colin, Insulated gate field emitter array.
  30. Groves Robert A. ; Nguyen-Ngoc Dominique ; Jadus Dale K. ; Walter Keith M., Low noise, high frequency solid state diode.
  31. Hussain,Tahir, Method and apparatus for fabricating heterojunction bipolar transistors with simultaneous low base resistance and short base transit time.
  32. Enicks,Darwin Gene, Method and system for controlled oxygen incorporation in compound semiconductor films for device performance enhancement.
  33. Alain Chantre FR; Didier Dutartre FR; Helene Baudry FR, Method for fabricating a bipolar transistor of the self-aligned double-polysilicon type with a heterojunction base and corresponding transistor.
  34. Jagannathan, Basanth, Method for fabricating heterojunction bipolar transistors.
  35. Boulenc, Pierre, Method for manufacturing a vertical bipolar transistor compatible with CMOS manufacturing methods.
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  38. Terpstra Doede,NLX ; Emons Catharina H. H.,NLX, Method of manufacturing a semiconductor device with a bipolar transistor.
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  41. Johnson, Frank Scott; Seitchik, Jerold A.; Soji, John, One mask PNP (or NPN) transistor allowing high performance.
  42. Klein, Wolfgang, Retrograde doped buried layer transistor and method for producing the same.
  43. Wilson, Colin, Robust field emitter array design.
  44. Furukawa, Toshiharu; Mandelman, Jack A.; Moy, Dan; Park, Byeongju; Tonti, William R., SOI hybrid structure with selective epitaxial growth of silicon.
  45. Chan, Kevin K.; Harame, David L.; Herrin, Russell T.; Liu, Qizhi, Self-aligned emitter-base in advanced BiCMOS technology.
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  47. Schulze, Hans-Joachim; Niedernostheide, Franz Josef; Soelkner, Gerald, Semiconductor component with high concentration doped zone embedded in emitter region.
  48. Heinemann,Bernd; Knoll,Dieter; Ehwald,Karl Ernst; R��cker,Holger, Semiconductor device and method for production thereof.
  49. Katsumata Yasuhiro,JPX ; Yoshino Chihiro,JPX ; Inoh Kazumi,JPX, Semiconductor device having bipolar transistor with unique ratio of base gummel number to impurity concentration of coll.
  50. Kalnitsky, Alexander; Uppili, Sudarsan; Park, Sang, Semiconductor transistor having a polysilicon emitter and methods of making the same.
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  52. Ramdani, Jamal; Printy, Craig; Adler, Steven J.; Labonte, Andre P., System and method for providing a single deposition emitter/base in a bipolar junction transistor.
  53. Sjodin, H.ang.kan; Soderbarg, Anders, Trenched semiconductor device with high breakdown voltage.
  54. Marty Michel,FRX ; Chantre Alain,FRX ; Regolini Jorge,FRX, Vertical bipolar transistor including an extrinsic base with reduced roughness, and fabrication process.
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