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Two-level spiral inductor structure having a high inductance to area ratio 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/00
출원번호 US-0594455 (1996-01-31)
발명자 / 주소
  • Burghartz Joachim Norbert (Shrub Oak NY) Jenkins Keith Aelwyn (Tarrytown NY) Ponnapalli Saila (Fishkill NY) Soyuer Mehmet (Yorktown Heights NY)
출원인 / 주소
  • International Business Machines Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 65  인용 특허 : 0

초록

A high-Q monolithic inductor structure formed using conventional silicon technology and having a first complete lower inductor spiral formed on a substrate and a second complete upper formed on a insulating layer over the first inductor spiral. Central portions of the inductor spirals are connected

대표청구항

A high-Q monolithic inductor structure for microwave applications fabricated using conventional silicon integrated circuit technology, comprising: a first inductor spiral formed on a substrate; an insulating layer formed over the first inductor spiral; a second inductor spiral formed on the insulati

이 특허를 인용한 특허 (65)

  1. Hamada, Yasuhiro; Kishimoto, Shuya; Maruhashi, Kenichi, Bias circuit and method of manufacturing the same.
  2. Lin, Mou-Shiung; Lee, Jin-Yuan, Chip packages having dual DMOS devices with power management integrated circuits.
  3. Lin, Mou-Shiung, Chip structure with a passive device and method for forming the same.
  4. Nallapureddy, Bhaskar W.; Wu, Songping; Yu, Tsunglun; Lou, Hui-Ling, Detection and estimation of radio frequency variations.
  5. Uzunov, Ivan; Järvenhaara, Jani; Broussev, Svetozar; Järvi, Joni; Persson, Lars, Differential band-pass filter having symmetrically interwoven inductors.
  6. Yen, Hsiao-Tsung; Luo, Cheng-Wei; Kuo, Chin-Wei; Jeng, Min-Chie, Helical spiral inductor between stacking die.
  7. Yeo, Kiat Seng; Tan, Hai Peng; Ma, Jianguo; Do, Manh Anh; Chew, Kok Wai Johnny, High performance RF inductors and transformers using bonding technique.
  8. Cheng, Chih-Chieh; Ranta, Tero Tapio; Whatley, Richard Bryon; Sekar, Vikram, High performance integrated tunable impedance matching network with coupled merged inductors.
  9. Lin, Mou-Shiung, High performance system-on-chip inductor using post passivation process.
  10. Lin, Mou-Shing, High performance system-on-chip using post passivation process.
  11. Lin, Mou-Shiung, High performance system-on-chip using post passivation process.
  12. Lin,Mou Shiung, High performance system-on-chip using post passivation process.
  13. Lin,Mou Shiung, High performance system-on-chip using post passivation process.
  14. Bozso, Ferenc M.; Emma, Philip G., High speed data channel including a CMOS VCSEL driver and a high performance photodetector and CMOS photoreceiver.
  15. Bozso,Ferenc M.; Emma,Philip G., High speed data channel including a CMOS VCSEL driver and a high performance photodetector and CMOS photoreceiver.
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  18. Andoh, Toshiakira; Sakakura, Makoto; Nakatani, Toshifumi; Takinami, Kouji; Hiraoka, Yukio, High-Q inductor for high frequency.
  19. Andoh, Toshiakira; Sakakura, Makoto; Nakatani, Toshifumi; Takinami, Kouji; Hiraoka, Yukio, High-Q inductor for high frequency.
  20. Senderowicz, Daniel, Highly selective passive filters using low-Q planar capacitors and inductors.
  21. Kuroda, Tadahiro, Inductor element, integrated circuit device, and three-dimensional circuit device.
  22. Abadeer, Wagdi; Groves, Robert A.; Hansen, Patrick, Inductor for integrated circuits.
  23. Pitts, Robert L.; Baldwin, Greg C., Integrated circuit inductor with integrated vias.
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  27. Jou, Chewnpu, Integrated inductor for RF transistor.
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  29. Lin, Mou-Shiung; Lee, Jin-Yuan, Method for making high-performance RF integrated circuits.
  30. Lin, Mou-Shiung; Lee, Jin-Yuan, Method for making high-performance RF integrated circuits.
  31. Kim, Nam Joo, Method of fabricating an inductor for a semiconductor device.
  32. Lee Jin Hyo,KRX ; Rhee Heung Soo,KRX ; Yu Hyun Kyu,KRX ; Kim Bo Woo,KRX ; Nam Kee Soo,KRX, Method of manufacturing inductor device on a silicon substrate thereof.
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  35. John W. Fattaruso, Monolithic inductor with guard rings.
  36. Ping Liou TW, Multi-level spiral inductor structure having high inductance (L) and high quality factor (Q).
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  38. Ronald L. Bentley, Multiple level spiral inductors used to form a filter in a printed circuit board.
  39. Lin, Mou-Shiung; Chou, Chiu-Ming; Chou, Chien-Kang, Post passivation interconnection process and structures.
  40. Lin, Mou-Shiung; Lee, Jin-Yuan, Post passivation interconnection schemes on top of IC chip.
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  46. Lin, Mou-Shiung; Chou, Chiu-Ming; Chou, Chien-Kang, Post passivation interconnection structures.
  47. Brunn, Brian T.; Sutardja, Sehat; Fan, Xiaohua; Uehara, Gregory T., Push-pull low-noise amplifier with area-efficient implementation.
  48. Brunn, Brian; Sutardja, Sehat; Fan, Xiaohua; Uehara, Gregory, Push-pull low-noise amplifier with area-efficient implementation.
  49. Sun, Pinping; Pei, Chengwen; Xu, Zheng, Reconfigurable multi-stack inductor.
  50. Lin, Yaojian; Liu, Kai; Chen, Kang, Semiconductor device including integrated passive device formed over semiconductor die with conductive bridge and fan-out redistribution layer.
  51. Shiramizu, Nobuhiro; Nakamura, Takahiro; Masuda, Toru; Kasa, Nobuhiro; Mori, Hiroshi, Semiconductor devices with inductors.
  52. Chiu, Tzuyin; Xu, Xiangming; Cai, Miao, Stack inductor with different metal thickness and metal width.
  53. Parthasarathy, Shyam; Vanukuru, Venkata Narayana Rao; Wolf, Randy Lee, Structure and method for high performance multi-port inductor.
  54. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  55. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  56. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  57. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  58. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  59. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  60. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  61. Ibrahim, Ibrahim, Transceiver coil for auditory prosthesis.
  62. Ibrahim,Ibrahim Hanna, Transceiver coil for auditory prosthesis.
  63. Coolbaugh,Douglas D.; Edelstein,Daniel C.; Groves,Robert A.; He,Zhong Xiang, Tri-metal and dual-metal stacked inductors.
  64. Zhao Ji ; Teng Chih Sieh, VLSI capacitors and high Q VLSI inductors using metal-filled via plugs.
  65. Lin, Mou-Shiung; Wei, Gu-Yeon, Voltage regulator integrated with semiconductor chip.
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