초록 ▼

A silicon flow sensor is provided having an uncomplicated design and construction, while also exhibiting a desirable level of sensitivity for use in automotive applications. The primary sensing component is preferably formed by a single silicon chip on which associated signal conditioning and compen

A silicon flow sensor is provided having an uncomplicated design and construction, while also exhibiting a desirable level of sensitivity for use in automotive applications. The primary sensing component is preferably formed by a single silicon chip on which associated signal conditioning and compensating circuitry can be provided. The chip includes a base region from which a vane is cantilevered so as to be adapted to deflect in either of two directions when impinged by fluid flow. A beam region is present intermediate the vane and the base region on which a strain sensing element is present, such that strain occurring in the beam region as a result of vane deflection is sensed to indicate the degree to which the vane is deflected. The construction of the flow sensor is such that its sensitivity can be readily modified during its manufacture in order to optimize the sensor for its intended use.

대표청구항 ▼

A bidirectional piezoresistive silicon flow sensor including a single silicon chip within a sensor package, the chip comprising: a base region having a thickness in a direction of fluid flow; a vane cantilevered from the base region and adapted to deflect when impinged by fluid flow, the vane having

A bidirectional piezoresistive silicon flow sensor including a single silicon chip within a sensor package, the chip comprising: a base region having a thickness in a direction of fluid flow; a vane cantilevered from the base region and adapted to deflect when impinged by fluid flow, the vane having a thickness in the direction of fluid flow, the thickness of the vane being less than the thickness of the base region, the vane having a width transverse to the direction of fluid flow; a beam region intermediate the vane and the base region, the beam having a width transverse to the direction of fluid flow, the width of the beam being less than the width of the vane; a piezoresistor disposed on the beam region for sensing strain occurring in the beam region as a result of the vane being deflected relative to the base region in the direction of fluid flow; and a frame disposed along a peripheral edge of the vane so as to form a gap therebetween, the gap being adapted to affect the sensitivity of the vane, the frame securing the chip to the sensor package.