초록 ▼

A wafer processing apparatus includes a common path, extending in a Y-axis direction, in which one wafer or a plurality of wafers are conveyed, a plurality of process units stacked on both sides of the common path to constitute multi-stage structures, a main handler moved in the common path in the Y

A wafer processing apparatus includes a common path, extending in a Y-axis direction, in which one wafer or a plurality of wafers are conveyed, a plurality of process units stacked on both sides of the common path to constitute multi-stage structures, a main handler moved in the common path in the Y-axis direction and rotated about a Z axis at an angle q

대표청구항 ▼

A substrate processing apparatus for performing a plurality of processes to a substrate comprising: a common path, extending in a Y-axis direction, in which one substrate or a plurality of substrates are conveyed; a plurality of process units stacked on both sides of said common path to constitute m

A substrate processing apparatus for performing a plurality of processes to a substrate comprising: a common path, extending in a Y-axis direction, in which one substrate or a plurality of substrates are conveyed; a plurality of process units stacked on both sides of said common path to constitute multi-stage structures; a main handler moved in said common path in the Y-axis direction and rotated about a Z axis at an angle q