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Process for manufacturing a semiconductor device bump electrode using a rapid thermal anneal 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/283
  • H01L-021/58
  • H01L-021/60
출원번호 US-0200673 (1994-02-23)
발명자 / 주소
  • Seppala Bryan R. (Apple Valley MN) Backer Todd G. (Apple Valley MN) Maier Lothar (Eden Prairie MN)
출원인 / 주소
  • Cypress Semiconductor Corp. (San Jose CA 02)
인용정보 피인용 횟수 : 74  인용 특허 : 0

초록

A rapid thermal anneal (RTA) process minimizes the intermixing of materials between a bump and a bonding pad so as to provide for a more reliable and durable interconnect between the bump and the bonding pad and so as to allow the probing of wafers prior to bumping. A barrier layer is formed over th

대표청구항

A method for use in semiconductor device fabrication comprising the steps of: (a) forming over a semiconductor substrate a semiconductor device having a bonding pad; (b) forming over the semiconductor device a layer having an opening which exposes a portion of the bonding pad; (c) forming a bump com

이 특허를 인용한 특허 (74)

  1. Shekhar Pramanick ; John A. Iacoponi, Alloy barrier layers for semiconductors.
  2. Moffat, William A.; McCoy, Craig Walter, Apparatus for the efficient coating of substrates.
  3. Huang, Cheng-Tang, Bump structure having a reinforcement member.
  4. Kuo, Nick; Chou, Chiu-Ming; Chou, Chien-Kang; Lin, Chu-Fu, Chip structure with bumps and testing pads.
  5. Lin,Mou Shiung, Chip structure with redistribution traces.
  6. Akram, Salman, Copper interconnect.
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  8. Akram,Salman, Copper interconnect.
  9. Akram,Salman, Copper interconnect for semiconductor device.
  10. Chen, Yen-Ming; Chu, Cheng-Yu; Lin, Kuo-Wei; Peng, Chiou-Shian; Fan, Yang-Tung; Fan, Fu-Jier; Lin, Shih-Jane, Dual layer photoresist method for fabricating a mushroom bumping plating structure.
  11. Maeda, Yukihiro; Ootani, Yuji; Nakano, Tetsuo; Nagasaka, Takashi, Electronic part mounting method.
  12. Sutardja,Sehat; Wu,Albert; Lee,Jin Yuan; Lin,Mou Shiung, Fabrication of wire bond pads over underlying active devices, passive devices and/or dielectric layers in integrated circuits.
  13. Virkar, Ajay; Yang, Xiqiang; Li, Ying-Syi; McKean, Dennis; LeMieux, Melburne C., Fused metal nanostructured networks, fusing solutions with reducing agents and methods for forming metal networks.
  14. Johnson,Klein L., Hermetic chip-scale package for photonic devices.
  15. Babcock,Jeff; Darmawan,Johan Agus; Mason,John; Diep,Ly, LDMOS transistor with improved gate shield.
  16. Ignaut, Sharon L., Light barrier for light sensitive semiconductor devices.
  17. Lee, Jin-Yuan; Lin, Mou-Shiung; Huang, Ching-Cheng, Low fabrication cost, fine pitch and high reliability solder bump.
  18. Lee, Jin-Yuan; Lin, Mou-Shiung; Huang, Ching-Cheng, Low fabrication cost, fine pitch and high reliability solder bump.
  19. Lee, Jin-Yuan; Lin, Mou-Shiung; Huang, Ching-Cheng, Low fabrication cost, fine pitch and high reliability solder bump.
  20. Akram, Salman, Method and semiconductor device having copper interconnect for bonding.
  21. Shih, Cheng-Hung; Hsieh, Yung-Wei; Lin, Shu-Chen; Lin, Cheng-Fan; Dai, Hua-An, Method for manufacturing fine-pitch bumps and structure thereof.
  22. Gutt, Thomas; Sgouridis, Sokratis, Method for producing and cleaning surface-mountable bases with external contacts.
  23. Imanishi,Makoto; Narita,Shoriki; Ikeya,Masahiko; Kanayama,Shinji; Mae,Takaharu, Method of forming bumps on a wafer utilizing a post-heating operation, and an apparatus therefore.
  24. Akram, Salman, Method of improving copper interconnects of semiconductor devices for bonding.
  25. Akram, Salman, Method of improving copper interconnects of semiconductor devices for bonding.
  26. Akram,Salman, Method of improving copper interconnects of semiconductor devices for bonding.
  27. Gottfried, Mark, Method of making an aligned electrode on a semiconductor structure.
  28. Liu Hermen,TWX ; Huang Yimin,TWX, Method of testing and packaging a semiconductor chip.
  29. Lee, Jin Yuan; Chen, Ying Chih; Lin, Mou Shiung, Method of wire bonding over active area of a semiconductor circuit.
  30. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
  31. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
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  33. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
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  35. Lee, Jin-Yuan; Chen, Ying-chih, Method of wire bonding over active area of a semiconductor circuit.
  36. Yang-Tung Fan TW; Hsiu-Mei Yu TW; Li-Hsin Tseng TW; Kuang-Peng Lin TW; Ta-Yang Lin TW, Method to achieve robust solder bump height.
  37. Wang, Tsing-Chow, Microelectronic fabrication having formed therein terminal electrode structure providing enhanced barrier properties.
  38. Tsing-Chow Wang ; Te-Sung Wu, Microelectronic fabrication having formed therein terminal electrode structure providing enhanced passivation and enhanced bondability.
  39. Yamamoto Motohiko,JPX ; Kubo Masaru,JPX, Photodetector element containing circuit element and manufacturing method thereof.
  40. Lin, Mou-Shiung, Post passivation interconnection schemes on top of the IC chips.
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  44. Lin,Mou Shiung; Chou,Chiu Ming; Chou,Chien Kang, Post passivation interconnection schemes on top of the IC chips.
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  47. Lin,Mou Shiung; Lee,Jin Yuan, Post passivation method for semiconductor chip or wafer.
  48. Lin,Mou Shiung; Lee,Jin Yuan, Post passivation structure for semiconductor chip or wafer.
  49. Kim Seong Jin,KRX, Semiconductor device having a bump structure and test electrode.
  50. Akram, Salman, Semiconductor device having copper interconnect for bonding.
  51. Lin, Mou-Shiung; Lei, Ming-Ta; Lin, Chuen-Jye, Structure and manufacturing method of a chip scale package.
  52. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  53. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
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  61. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  62. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  63. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  64. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  65. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  66. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  67. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  68. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  69. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  70. Lin,Mou Shiung, Top layers of metal for high performance IC's.
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  72. Lin, Mou-Shiung; Chou, Chiu-Ming; Chou, Chien-Kang, Top layers of metal for integrated circuits.
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