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Pressure type flow rate control apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/12
출원번호 US-0661181 (1996-06-10)
우선권정보 JP-0144722 (1995-06-12)
발명자 / 주소
  • Nishino Koji (Osaka JPX) Ikeda Nobukazu (Osaka JPX) Morimoto Akihiro (Osaka JPX) Minami Yukio (Osaka JPX) Kawada Koji (Osaka JPX) Dohi Ryosuke (Osaka JPX) Fukuda Hiroyuki (Osaka JPX)
출원인 / 주소
  • Fujikin Incorporated (Osaka JPX 03)
인용정보 피인용 횟수 : 49  인용 특허 : 0

초록 ▼

A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the up

대표청구항 ▼

A pressure type flow rate control apparatus for controlling flow rate of a fluid comprising: means for forming an orifice; means for maintaining a pressure P1 upstream of the orifice at more than twice a pressure p2 downstream of the orifice and for maintaining the pressure P2 downstream of the orif

이 특허를 인용한 특허 (49)

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  11. Ohmi, Tadahiro; Saito, Masahito; Hino, Shoichi; Shimazu, Tsuyoshi; Miura, Kazuyuki; Nishino, Kouji; Nagase, Masaaki; Sugita, Katsuyuki; Hirata, Kaoru; Dohi, Ryousuke; Hirose, Takashi; Shinohara, Tsutomu; Ikeda, Nobukazu; Imai, Tomokazu; Yoshida, Toshihide; Tanaka, Hisashi, Flow rate range variable type flow rate control apparatus.
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  12. Ohmi, Tadahiro; Saito, Masahito; Hino, Shoichi; Shimazu, Tsuyoshi; Miura, Kazuyuki; Nishino, Kouji; Nagase, Masaaki; Sugita, Katsuyuki; Hirata, Kaoru; Dohi, Ryousuke; Hirose, Takashi; Shinohara, Tsutomu; Ikeda, Nobukazu; Imai, Tomokazu; Yoshida, Toshihide; Tanaka, Hisashi, Flow rate range variable type flow rate control apparatus.
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  13. Ohmi, Tadahiro; Saito, Masahito; Hino, Shoichi; Shimazu, Tsuyoshi; Miura, Kazuyuki; Nishino, Kouji; Nagase, Masaaki; Sugita, Katsuyuki; Hirata, Kaoru; Dohi, Ryousuke; Hirose, Takashi; Shinohara, Tsutomu; Ikeda, Nobukazu; Imai, Tomokazu; Yoshida, Toshihide; Tanaka, Hisashi, Flow rate range variable type flow rate control apparatus.
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  14. Ohmi, Tadahiro; Saito, Masahito; Hino, Shoichi; Shimazu, Tsuyoshi; Miura, Kazuyuki; Nishino, Kouji; Nagase, Masaaki; Sugita, Katsuyuki; Hirata, Kaoru; Dohi, Ryousuke; Hirose, Takashi; Shinohara, Tsutomu; Ikeda, Nobukazu; Imai, Tomokazu; Yoshida, Toshihide; Tanaka, Hisashi, Flow rate range variable type flow rate control apparatus.
    상세보기
  15. Ohmi Tadahiro,JPX ; Kagazume Tetu,JPX ; Sugiyama Kazuhiko,JPX ; Dohi Ryousuke,JPX ; Minami Yukio,JPX ; Nishino Kouji,JPX ; Kawata Kouji,JPX ; Ikeda Nobukazu,JPX ; Yamaji Michio,JPX, Fluid supply apparatus.
    상세보기
  16. Ono, Kumiko; Tsujimoto, Hiroshi; Sawachi, Atsushi; Amikura, Norihiko; Sasaki, Norikazu; Kawaguchi, Yoshitaka, Gas supply control method.
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  17. Ohmi Tadahiro,JPX ; Kagatsume Satoshi,JPX ; Ikeda Nobukazu,JPX ; Nishino Kouji,JPX ; Yoshikawa Kazuhiro,JPX ; Ideta Eiji,JPX ; Dohi Ryousuke,JPX ; Uno Tomio,JPX ; Yamaji Michio,JPX, Gas supply system equipped with pressure-type flow rate control unit.
    상세보기
  18. Ohmi, Tadahiro; Nishino, Kouji; Dohi, Ryousuke; Ikeda, Nobukazu; Nagase, Masaaki; Hirata, Kaoru; Sugita, Katsuyuki; Shinohara, Tsutomu; Hirose, Takashi; Imai, Tomokazu; Yoshida, Toshihide; Tanaka, Hisashi, Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed.
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  19. Takamoto Masaki,JPX ; Nakao Shinichi,JPX ; Ishibashi Masahiro,JPX ; Ina Yoshitaka,JPX ; Yokoi Yoshikazu,JPX ; Hayakawa Masao,JPX, Mass flow control method and device utilizing a sonic nozzle.
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  20. Tinsley,Kenneth E.; Tariq,Faisal, Method and system for a mass flow controller with reduced pressure sensitivity.
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  21. McDonald, R. Mike, Method and system for operating a mass flow controller.
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  22. Nagase, Masaaki; Dohi, Ryousuke; Ikeda, Nobukazu; Nishino, Kouji; Hirata, Kaoru; Sugita, Katsuyuki; Matsumoto, Atsushi, Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus.
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  23. Lull, John Michael; Wang, Chiun; Saggio, Jr., Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
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  27. Ohmi, Tadahiro; Kagatsume, Satoshi; Sugiyama, Kazuhiko; Minami, Yukio; Nishino, Kouji; Dohi, Ryousuke; Yonehana, Katsunori; Ikeda, Nobukazu; Yamaji, Michio; Hirose, Jun; Fukazawa, Kazuo; Koizumi, Hir, Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus.
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  28. Ohmi, Tadahiro; Kagatsume, Satoshi; Sugiyama, Kazuhiko; Minami, Yukio; Nishino, Kouji; Dohi, Ryousuke; Yonehana, Katsunori; Ikeda, Nobukazu; Yamaji, Michio; Hirose, Jun; Fukazawa, Kazuo; Koizumi, Hir, Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus.
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  29. Yasumoto, Naofumi; Dohi, Ryousuke; Nishino, Kouji; Ikeda, Nobukazu; Shigyou, Kohei, Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device.
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  39. Somani, Bhushan, Real time diagnostics for flow controller systems and methods.
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  44. Lull,John M; Wang,Chiun; Valentine,William S; Saggio, Jr.,Joseph A, System and method for a mass flow controller.
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  46. Ishii, Mamoru, Thermal mass-flow meter and mass-flow control device using same.
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