초록 ▼

In accordance with the present invention, methods and systems are provided which afford solutions to the problems of gas distribution of ultra-high purity ESGs at high gas flow rates. A first aspect of the invention is a system comprising a compressed liquefied gas container; an internal heat exchan

In accordance with the present invention, methods and systems are provided which afford solutions to the problems of gas distribution of ultra-high purity ESGs at high gas flow rates. A first aspect of the invention is a system comprising a compressed liquefied gas container; an internal heat exchanger within the compressed liquefied gas container; a gas supply conduit which takes feed from the container and delivers the ESG to a process; and an external heat exchanger positioned effectively near the conduit downstream of the container but upstream of the process.

대표청구항 ▼

A system for delivery of an ultra-high purity gas from a liquid form, the gas being supplied at high or highly varying flow rate, the system comprising: a container including an interior space for a compressed liquefied gas, said interior space including an internal shape; an internal heat exchanger

A system for delivery of an ultra-high purity gas from a liquid form, the gas being supplied at high or highly varying flow rate, the system comprising: a container including an interior space for a compressed liquefied gas, said interior space including an internal shape; an internal heat exchanger within the container, said internal heat exchanger having a peripheral shape which closely follows said interior space internal shape; a gas supply conduit in fluid communication with said interior space of the container; and an external heat exchanger positioned in the vicinity of the container and gas supply conduit, said internal and external heat exchangers preventing entrained liquid droplets from entering or forming in said gas supply conduit.