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Microvalve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/70
출원번호 US-0556911 (1995-11-20)
우선권정보 DE-4317676 (1993-05-21)
국제출원번호 PCT/DE94/00599
§371/§102 date 19951120 (19951120)
국제공개번호 WO-9428318 (1994-12-08)
발명자 / 주소
  • Lisec Thomas (Berlin DEX) Quenzer Hans-Joachim (Berlin DEX) Wagner Bernd (Berlin DEX)
출원인 / 주소
  • Fraunhofer-Gesellschaft zur Forderung der angerwanden Forschung e.V. (Munich DEX 03)
인용정보 피인용 횟수 : 147  인용 특허 : 0

초록 ▼

The present invention relates to a microvalve usable primarily as a pilot valve in pneumatic controls. The prior art solenoid valves used in this field can be miniaturized only at considerably high cost. The microvalve of the invention consists of a first part (1), on the pressure side, with a diaph

대표청구항 ▼

A microvalve, comprising: first and second housing sections made of microstructurable material and sealingly connected to each other along marginal portions, at least one of said housing sections defining at least one recess in a surface facing the other of said housing sections to define a substant

이 특허를 인용한 특허 (147)

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