초록 ▼

A light-weight super high vacuum vessel is disclosed in which a super high vacuum pressure over 10-10 Torr or over 10-11 Torr can be achieved using a simple evacuation system and/or with a sealing structure. The super high vacuum vessel contains a member comprising: from 0.02 wt. % to 1.00 wt. % of

A light-weight super high vacuum vessel is disclosed in which a super high vacuum pressure over 10-10 Torr or over 10-11 Torr can be achieved using a simple evacuation system and/or with a sealing structure. The super high vacuum vessel contains a member comprising: from 0.02 wt. % to 1.00 wt. % of at least one platinum-group metal selected from the group consisting of Pd, Pt, Rh, Ru, Re, and Os; from 0.1 wt. % to 3.0 wt. % of at least one transition metal selected from the group consisting of Co, Fe, Cr, Ni, Mn, and Cu; from 0.1 wt. % to 3.0 wt. % of at least one rare earth series element selected from the group consisting of La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, and Y; impurity elements of C, N, and O, C being equal to or less than 0.05 wt. %, N being equal to or less than 0.05 wt. %, O being equal to or less than 0.08 wt. %; and Ti and inevitable impurities.

대표청구항 ▼

A super high vacuum vessel having a member suitable for a super high vacuum pressure exceeding 10-10 Torr, said vacuum vessel having a member, said member comprising: a) at least one Platinum-series metal having 0.02 wt. % to 1.00 wt. % selected from a group consisting of Pd, Pt, Rh, Ru, Re, and Os;

A super high vacuum vessel having a member suitable for a super high vacuum pressure exceeding 10-10 Torr, said vacuum vessel having a member, said member comprising: a) at least one Platinum-series metal having 0.02 wt. % to 1.00 wt. % selected from a group consisting of Pd, Pt, Rh, Ru, Re, and Os; b) at least one transition metal having 0.1 wt. % to 3.0 wt. % selected from a group consisting of Co, Fe, Cr, Ni, Mn, and Cu; c) at least one rare earth series metal having 0.1 wt. % to 3.0 wt. % selected from a group consisting of La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er , and Y; d) Aluminum ranging from 0.2 wt. % to 9.5 wt. %; e) impurity elements of C, N, and O, C being equal or less than 0.05 wt. %, N being equal or less than 0.05 wt. %, O being equal or less than 0.08 wt. %; and f) balance Ti and inevitable impurities.