초록 ▼

A novel pyrodetector element is produced by oriented growth, with the aid of buffer layers, above a monocrystalline silicon substrate and thus enables the fabrication of an array of pyrodetectors having read-out and amplifier circuitry integrated on the common substrate. Proposed as the buffer layer

A novel pyrodetector element is produced by oriented growth, with the aid of buffer layers, above a monocrystalline silicon substrate and thus enables the fabrication of an array of pyrodetectors having read-out and amplifier circuitry integrated on the common substrate. Proposed as the buffer layers are yttrium-stabilized zirconium oxide YSZ or magnesium oxide above an interlayer made of spinel.

대표청구항 ▼

A pyrodetector element of thin-film construction, comprising: a) a monocrystalline silicon substrate, b) an epitaxial layer which is applied above the silicon substrate, c) a first electrode layer, d) a c-axis-oriented pyroelectric layer of a perovskite, and e) a second electrode layer, wherein said

A pyrodetector element of thin-film construction, comprising: a) a monocrystalline silicon substrate, b) an epitaxial layer which is applied above the silicon substrate, c) a first electrode layer, d) a c-axis-oriented pyroelectric layer of a perovskite, and e) a second electrode layer, wherein said first electrode layer is of an electrically conductive oxide selected from a class of the perovskites having a general empirical formula (LaCa) (MnCo), O3 and (LaPbCa) (MnCoTi) O3 and wherein said pyroelectric layer is of same components as said first electrode layer, but has a different cation ratio. A pyrodetector element of thin-film construction, comprising: a) a monocrystalline silicon substrate, b) an epitaxial layer which is applied above the silicon substrate, c) first electrode layer, d) a c-axis-oriented pyroelectric layer of a perovskite, and e) a second electrode layer, wherein said epitaxial layer is an epitaxial interlayer which is made of spinel and an at least oriented buffer layer applied thereabove, which is made of magnesium oxide.