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Etching method, method of producing a semiconductor device, and etchant therefor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23F-001/10
  • H01L-021/306
출원번호 US-0429039 (1995-04-26)
우선권정보 JP-0092756 (1994-04-28)
발명자 / 주소
  • Ichinose Hirofumi (Tsuzuki-gun JPX) Shinkura Satoshi (Tsuzuki-gun JPX) Hasebe Akio (Souraku-gun JPX) Murakami Tsutomu (Nara JPX)
출원인 / 주소
  • Canon Kabushiki Kaisha (Tokyo JPX 03)
인용정보 피인용 횟수 : 31  인용 특허 : 7

초록

초록이 없습니다.

대표청구항 ▼

An etching method comprising the steps of: a) disposing an etching paste on a transparent conductive film material in a pattern, said etching paste comprising at least one kind of fine particles and an etching solution, wherein said fine particles comprise resin particles selected from the group con

이 특허에 인용된 특허 (7)

  1. Steeves, Arthur F.; Buono, Donald P., Attack polish for nickel-base alloys and stainless steels.
    상세보기
  2. Bowen Terry P. (Etters PA) Deeg Emil W. (Lemoyne PA) Helm James G. (Camp Hill PA) Stauffer Larry R. (Camp Hill PA), Construction of an optical fiber with a connector.
    상세보기
  3. Totsuka Nobuo (Chiba JPX) Kikuchi Katsuhei (Chiba JPX) Kurisu Takao (Chiba JPX), Electrolytic process and apparatus for forming pattern on surface of metallic object.
    상세보기
  4. Croll Theodore P. (4242 Mechanicsville Rd. Mechanicsville PA 18934), Enamel-bonding etchant and procedure.
    상세보기
  5. Pentak William F. (Houston TX) Burkes Dewey L. (Pasadena TX), Method for creating a design in relief in a hard smooth substrate and apparatus for use in the method.
    상세보기
  6. Yu Chris C. (Boise ID) Doan Trung T. (Boise ID), Slurries for chemical mechanically polishing copper containing metal layers.
    상세보기
  7. Nath Prem (Troy MI), Solar cell and method for producing same.
    상세보기

이 특허를 인용한 특허 (31)

  1. Korevaar, Bastiaan Arie; Rojo, Juan Carlos; Shuba, Roman, Back contact electrodes for cadmium telluride photovoltaic cells.
    상세보기
  2. Singh, Rajiv K.; Lee, Seung-Mahn, Chemical-mechanical polishing slurry for polishing of copper or silver films.
    상세보기
  3. Klein, Sylke; Kübelbeck, Armin; Stockum, Werner; Schmidt, Wilfried; Schum, Berthold, Combined etching and doping media.
    상세보기
  4. Brabec, Christoph; Hauch, Jens; Gaudiana, Russell; Welte, Andrea; He, Jin-An; Zeira, Eitan C., Electrode containing a polymer and an additive.
    상세보기
  5. Winoto, Adrian; Wolk, Jeffrey, Etch patterning of nanostructure transparent conductors.
    상세보기
  6. Cheng, Lap-Tak Andrew; Lu, Meijun, Etching method for use with thin-film photovoltaic panel.
    상세보기
  7. Kübelbeck, Armin; Klein, Sylke; Stockum, Werner, Etching pastes for silicon surfaces and layers.
    상세보기
  8. Narasimhan, Mukundan; Johnson, Todd; Basol, Bulent M., Finger pattern formation for thin film solar cells.
    상세보기
  9. Myers, Timothy Edward; Shanmugam, Shyamala; Stephens, II, Alan Thomas; Towner, Matthew John; Uhlig, Kevin William; Zhang, Lu, Glass etching media and methods.
    상세보기
  10. Gray,Brian Francis; Stone,Keith Joseph, Method for making a metal forming structure.
    상세보기
  11. Tu, Chih-Chiang; Chen, Chun-Lang, Method for manufacturing photovoltaic device.
    상세보기
  12. Mayers, Brian T.; Carbeck, Jeffrey; Saadi, Wajeeh; Whitesides, George M.; Kügler, Ralf; Kursawe, Monika; Canisius, Johannes, Method for patterning a surface.
    상세보기
  13. Lu, Meijun; Cheng, Lap-Tak Andrew, Method for producing a thin-film photovoltaic cell having an etchant-resistant electrode and an integrated bypass diode and a panel incorporating the same.
    상세보기
  14. Lu, Meijun; Cheng, Lap-Tak Andrew, Method for producing an array of thin-film photovoltaic cells having a totally separated integrated bypass diode and method for producing a panel incorporating the same.
    상세보기
  15. M체nzer,Adolf; Schlosser,Reinhold, Method for structuring an oxide layer applied to a substrate material.
    상세보기
  16. Wang, Chiou-Fu; Chiang, Huo-Hsien, Method of making monolithic photovoltaic module on flexible substrate.
    상세보기
  17. Shinohara,Wataru, Method of manufacturing photovoltaic device.
    상세보기
  18. Korevaar, Bastiaan Arie; Rojo, Juan Carlos; Shuba, Roman, Methods for forming back contact electrodes for cadmium telluride photovoltaic cells.
    상세보기
  19. Daito Naoki,JPX ; Nomura Toshihiro,JPX ; Okawa Ryuji,JPX ; Katsube Koji,JPX ; Takabatake Yoshinobu,JPX, Photovoltaic apparatus and method of manufacturing a photovoltaic apparatus.
    상세보기
  20. Tu, Chih-Chiang; Chen, Chun-Lang, Photovoltaic device.
    상세보기
  21. Yang, Yun; Gerlach, Ryan T., Plastic capacitive touch screen and method of manufacturing same.
    상세보기
  22. Stockum, Werner; Kuebelbeck, Armin; Nakanowatari, Jun, Printable etching media for silicon dioxide and silicon nitride layers.
    상세보기
  23. Stockum, Werner; Kuebelbeck, Armin, Printable medium for etching oxidic, transparent and conductive layers.
    상세보기
  24. Stockum, Werner; Kuebelbeck, Armin; Klein, Sylke, Printable medium for the etching of silicon dioxide and silicon nitride layers.
    상세보기
  25. Szlufcik,Jozef; Van Kerschaver,Emmanuel; Alleb？,Christophe, Semiconductor etching paste and the use thereof for localized etching of semiconductor substrates.
    상세보기
  26. Bae, Do Won; Pak, Hisun, Solar cell.
    상세보기
  27. Shimada Takayuki,JPX ; Kajitani Masaru,JPX ; Okamoto Masaya,JPX ; Kondo Naofumi,JPX ; Katayama Mikio,JPX ; Sakuhana Yoshikazu,JPX ; Yamamoto Akihiro,JPX ; Nakata Yukinobu,JPX ; Nishiki Hirohiko,JPX ;, Transmission type liquid crystal display device having capacitance ratio of 10% or less and charging rate difference of.
    상세보기
  28. Shimada Takayuki,JPX ; Kajitani Masaru,JPX ; Okamoto Masaya,JPX ; Kondo Naofumi,JPX ; Katayama Mikio,JPX ; Sakuhana Yoshikazu,JPX ; Yamamoto Akihiro,JPX ; Nakata Yukinobu,JPX ; Nishiki Hirohiko,JPX ;, Transmission type liquid crystal display device with connecting electrode and pixel electrode connected via contact hole through interlayer insulating film and method for fabricating.
    상세보기
  29. Takayuki Shimada JP; Masaru Kajitani JP; Masaya Okamoto JP; Naofumi Kondo JP; Mikio Katayama JP; Yoshikazu Sakuhana JP; Akihiro Yamamoto JP; Yukinobu Nakata JP; Hirohiko Nishiki JP, Transmission type liquid crystal display having a transparent colorless organic interlayer insulating film between pixel electrodes and switching.
    상세보기
  30. Shimada Takayuki,JPX ; Kajitani Masaru,JPX ; Okamoto Masaya,JPX ; Kondo Naofumi,JPX ; Katayama Mikio,JPX ; Sakuhana Yoshikazu,JPX ; Yamamoto Akihiro,JPX ; Nakata Yukinobu,JPX ; Nishiki Hirohiko,JPX, Transmission type liquid crystal display having an organic interlayer elements film between pixel electrodes and switching.
    상세보기
  31. Shimada Takayuki,JPX ; Kajitani Masaru,JPX ; Okamoto Masaya,JPX ; Kondo Naofumi,JPX ; Katayama Mikio,JPX ; Sakuhana Yoshikazu,JPX ; Yamamoto Akihiro,JPX ; Nakata Yukinobu,JPX ; Nishiki Hirohiko,JPX ;, Transmission type liquid crystal display having an organic interlayer elements film between pixel electrodes and switching.
    상세보기

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