초록 ▼

A precursor liquid comprising several metal 2-ethylhexanoates, such as stroritium tantalum and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the de

A precursor liquid comprising several metal 2-ethylhexanoates, such as stroritium tantalum and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate. Then an integrated circuit is completed to include at least a potion of the layered superlattice material film in a component of the integrated circuit.

대표청구항 ▼

A method of fabricating a thin film of a layered superlattice material, said method comprising the steps of: (a) providing a liquid precursor including a plurality of metal moieties in effective amounts for forming a layered superlattice material; (b) placing a substrate inside an enclosed depositio

A method of fabricating a thin film of a layered superlattice material, said method comprising the steps of: (a) providing a liquid precursor including a plurality of metal moieties in effective amounts for forming a layered superlattice material; (b) placing a substrate inside an enclosed deposition chamber; (c) producing a mist of said liquid precursor; (d) flowing said mist through said deposition chamber to form a layer of the precursor liquid on said substrate; and (e) treating the liquid layer deposited on said substrate to form a solid film of said layered superlattice material.