초록 ▼

The present invention refers to a wafer transfer robot for a wafer boat of a wafer processing apparatus wherein a turntable within a chamber of a turntable apparatus is provided with a prescribed number of stations formed thereon. Each of the stations is provided with protrusions that hold a wafer c

The present invention refers to a wafer transfer robot for a wafer boat of a wafer processing apparatus wherein a turntable within a chamber of a turntable apparatus is provided with a prescribed number of stations formed thereon. Each of the stations is provided with protrusions that hold a wafer cassette that is transferred thereto and orientated thereon in such a manner that a base surface thereof is inclined at an angle to the outward direction. Although, while the wafer cassette is being transferred and orientated, it is transferred and orientated reliably with the base surface thereof held horizontal by an elevator apparatus. By providing a loadlock chamber of a rotational configuration, the apparatus of the present invention ensures good sealing, and also ensures that when regions within the apparatus are being evacuated or being filled with an inert gas, they are kept reliably airtight. The generation of particles due to linear frictional movement is thus prevented, and the wafer processing can be performed extremely reliably and efficiently.

대표청구항 ▼

A wafer processing apparatus for transferring wafers from a wafer cassette to a wafer boat, said apparatus comprising: means defining a wafer loading/unloading chamber adapted to receive a wafer boat, a heat-treatment furnace, a first elevator means for moving and supporting a wafer boat within said

A wafer processing apparatus for transferring wafers from a wafer cassette to a wafer boat, said apparatus comprising: means defining a wafer loading/unloading chamber adapted to receive a wafer boat, a heat-treatment furnace, a first elevator means for moving and supporting a wafer boat within said loading/unloading chamber, said first elevator means being mounted to a floor of said wafer loading/unloading chamber, for vertically moving the wafer boat into and out of said vertical heat treatment furnace, means defining a transfer housing, gate valve means connecting said loading/unloading chamber and said transfer housing, said gate valve means selectively airtightly isolating said loading/unloading chamber and said transfer housing, and a wafer transfer apparatus located within said transfer housing, said wafer transfer apparatus including a transfer means for transferring wafers from a location in a wafer cassette to the wafer boat on said first elevator means, and a second elevator means for reciprocally vertically moving said transfer means with respect to the wafer boat, said reciprocal vertical movement of said second elevator means defining a stroke with respect to the boat that is equivalent to a height of the wafer cassette.