초록 ▼

An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the val

An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

대표청구항 ▼

An integrated chemical vapor delivery system for delivery of chemical vapor from a liquid source to a processing unit with a processing chamber therein for semiconductor wafers, said system comprising a housing having a wall and means for mounting said housing to said processing chamber; a reservoir

An integrated chemical vapor delivery system for delivery of chemical vapor from a liquid source to a processing unit with a processing chamber therein for semiconductor wafers, said system comprising a housing having a wall and means for mounting said housing to said processing chamber; a reservoir defined by said housing for holding a liquid from said source, said reservoir connected to said source and to said processing chamber when said module housing is mounted to said processing unit; means in said housing walls for heating said reservoir so that liquid in said reservoir is transformed into a vapor; and means in said housing for controlling the delivery of said vapor from said reservoir to said processing chamber; whereby said system controllably supplies vapor from said liquid supply to said processing chamber. An integrated module for the delivery of chemical vapor from a liquid source through an inlet to a processing chamber of a processing unit for semiconductor wafers, said module comprising a metal housing having solid lower and upper parts, said lower and upper parts fitting together, said lower part having walls defining a reservoir for holding a liquid from said source; a supply channel in said upper housing part connecting said reservoir to a supply inlet for connection to said source; a gas channel in said upper housing part connecting said reservoir to an outlet; means for mounting said housing to said processing unit such that said outlet is connected to said processing chamber inlet; means in said walls of said upper housing part for heating said reservoir so that liquid in said reservoir is transformed into vapor; and means integrally mounted to said housing and connected to said gas channel for controlling the delivery of said vapor from said reservoir to said processing chamber; whereby said module controllably supplies vapor from said liquid supply to said processing chamber.