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Fluid storage and delivery system comprising high work capacity physical sorbent 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/04
출원번호 US-0650633 (1996-05-20)
발명자 / 주소
  • Tom Glenn M.
  • McManus James V.
  • Olander W. Karl
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist
인용정보 피인용 횟수 : 68  인용 특허 : 0

초록 ▼

An adsorption-desorption apparatus, for storage and dispensing of a sorbable gas, wherein a physical sorbent medium bearing the adsorbed gas to be selectively dispensed is delivered by pressure differential desorption and/or thermal desorption of the sorbate gas from the sorbent material. The sorben

대표청구항 ▼

[ What is claimed is:] [1.] An adsorption-desorption apparatus, for storage and dispensing of a sorbable fluid, said apparatus comprising:a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing fluid into and out of said

이 특허를 인용한 특허 (68)

  1. Hertzler, Benjamin Lee, Adsorbent based gas delivery system with integrated purifier.
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  2. Carruthers, J. Donald; Petruska, Melissa A.; Wilson, Shaun M.; Sturm, Edward A., Adsorbent having utility for CO2 capture from gas mixtures.
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  3. Carruthers, J. Donald; Petruska, Melissa A.; Wilson, Shaun M.; Sturm, Edward A., Adsorbent having utility for CO2 capture from gas mixtures.
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  4. Homan, Jeffrey J.; Arno, Jose I.; Sweeney, Joseph D., Apparatus and process for integrated gas blending.
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  5. Olander, W. Karl; Arno, Jose I.; Kaim, Robert, Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation.
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  6. Wilson, Shaun M.; Sturm, Edward A.; Wodjenski, Michael J.; Carruthers, J. Donald; Sweeney, Joshua B., Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent.
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  7. Petruska, Melissa A.; Carruthers, J. Donald; Sturm, Edward A.; Wilson, Shaun M.; Sweeney, Joshua B., Carbon pyrolyzate adsorbent having utility for CO2 capture and methods of making and using the same.
    상세보기
  8. Petruska, Melissa A.; Carruthers, J. Donald; Sturm, Edward A.; Wilson, Shaun M.; Sweeney, Joshua B., Carbon pyrolyzate adsorbent having utility for CO2 capture and methods of making and using the same.
    상세보기
  9. Petruska, Melissa A.; Carruthers, J. Donald; Sturm, Edward A.; Wilson, Shaun M.; Sweeney, Joshua B., Carbon pyrolyzate adsorbent having utility for CO2 capture and methods of making and using the same.
    상세보기
  10. Carruthers, J. Donald; Boggs, Karl; Wang, Luping; Wilson, Shaun M.; Arno, Jose I.; Marganski, Paul J.; Bilodeau, Steven M.; Zou, Peng; Bobita, Brian; Sweeney, Joseph D.; Edwards, Douglas, Component for solar adsorption refrigeration system and method of making such component.
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  11. Carruthers, J. Donald; Boggs, Karl; Wang, Luping; Wilson, Shaun; Arno, Jose I.; Marganski, Paul J.; Bilodeau, Steven M.; Zou, Peng; Bobita, Brian; Sweeney, Joseph D.; Edwards, Douglas, Component for solar adsorption refrigeration system and method of making such component.
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  12. Miki,Takashi, Cryogenic system.
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  13. Martin ; Jr. Thomas B ; Le Febre David A., Fail-safe delivery arrangement for pressurized containers.
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  14. Le Febre David A. ; Martin ; Jr. Thomas B., Fail-safe delivery valve for pressurized tanks.
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  15. Luping Wang ; Terry A. Tabler ; James A. Dietz, Fluid distribution system and process, and semiconductor fabrication facility utilizing same.
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  16. Wang, Luping; Salsbury, Joseph, Fluid storage and delivery system utilizing low heels carbon sorbent medium.
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  17. George R. Brandes ; Thomas H. Baum ; Michael A. Tischler, Fluid storage and dispensing system.
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  18. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; DiMeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  19. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  20. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  21. McManus, James V.; Dietz, James; Lurcott, Steven M., Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  22. Olander, W. Karl; McManus, James V.; Hultquist, Steven J.; Arno, Jose I.; Van Buskirk, Peter C., Fluid storage and dispensing systems, and fluid supply processes comprising same.
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  23. Glenn M. Tom ; James V. McManus, Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
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  24. Tom, Glenn M.; McManus, James V., Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
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  25. Zheng, Dao-Hong; Irven, John; George, Mark Allen, Gas control device and method of supplying gas.
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  26. Zheng, Dao-Hong; Irven, John; George, Mark Allen, Gas control device and method of supplying gas.
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  27. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  28. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  29. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  30. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  33. Loutfy Raouf O. ; Lu Xiao-Chun ; Li Weijiong ; Mikhael Michael G., Gas storage using fullerene based adsorbents.
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  34. Tanaka, Junichi; Orita, Takashi; Echigojima, Makoto, Gas supply apparatus and gas supply method.
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  35. Hayes, Michael W.; Holst, Mark R.; Arno, Jose I.; Tom, Glenn M., Integrated ion implant scrubber system.
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  37. Kaim, Robert; Sweeney, Joseph D.; Byl, Oleg; Yedave, Sharad N.; Jones, Edward E.; Zou, Peng; Tang, Ying; Chambers, Barry Lewis; Ray, Richard S., Isotopically-enriched boron-containing compounds, and methods of making and using same.
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  38. Kaim, Robert; Sweeney, Joseph D.; Byl, Oleg; Yedave, Sharad N.; Jones, Edward E.; Zou, Peng; Tang, Ying; Chambers, Barry Lewis; Ray, Richard S., Isotopically-enriched boron-containing compounds, and methods of making and using same.
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  39. Tom Glenn M., Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system.
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  40. McConnell, Rachel Dianne; Hurst, Ann Marie; Shi, Xiaobo, Method for chemical mechanical planarization of a tungsten-containing substrate.
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  45. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.
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  47. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.
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  48. Tom, Glenn, Permeable gas assembly for gas delivery.
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  50. Volker,George Murray; Lech,Leo Michael, Portable tank and process for drying hygroscopic materials.
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  51. Olander, W. Karl; Donatucci, Matthew B.; Wang, Luping; Wodjenski, Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
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  52. Olander, W. Karl; Donatucci, Matthew B.; Wang, Luping; Wodjenski, Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
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  53. Olander,W. Karl; Donatucci,Matthew B; Wang,Luping; Wodjenski,Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
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  54. Semerdjian Roy V. ; Le Febre David A. ; Martin ; Jr. Thomas B., Pressurized container with restrictor tube having multiple capillary passages.
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  55. Wang Luping ; McManus James V., Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment.
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  56. Brestovansky,Dennis; Wodjenski,Michael J.; Arno,Jose I.; Carruthers,J. Donald; Moroco, legal representative,Judith A.; Moroco,Philip A., Rectangular parallelepiped fluid storage and dispending vessel.
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  57. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Philip A., Rectangular parallelepiped fluid storage and dispensing vessel.
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  59. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Phillip A., Rectangular parallelepiped fluid storage and dispensing vessel.
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  60. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Phillip A.; Moroco, legal representative, Judith A., Rectangular parallelepiped fluid storage and dispensing vessel.
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  61. Brestovansky,Dennis; Moroco,Philip A., Rectangular parallelepiped fluid storage and dispensing vessel.
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  62. Brestovansky,Dennis; Wodjenski,Michael J.; Arno,Jose I.; Carruthers,J. Donald, Rectangular parallelepiped fluid storage and dispensing vessel.
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  63. Olander, W. Karl; Sweeney, Joseph D.; Wang, Luping, Semiconductor manufacturing facility utilizing exhaust recirculation.
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  64. Tom Glenn M. ; McManus James V., Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium.
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  65. Tom, Glenn M.; McManus, James V.; Wang, Luping; Olander, W. Karl, Sorbent-based gas storage and delivery system.
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  66. Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.
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  67. Galbraith, S. Douglas, Sorption method, device, and system.
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  68. Pearlstein,Ronald Martin; Langan,John Giles; Zheng,Dao Hong; Irven,John; Hertzler,Benjamin Lee, Sub-atmospheric gas delivery method and apparatus.
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