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Process system with integrated gas storage and delivery unit 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/047
출원번호 US-0742856 (1996-11-01)
발명자 / 주소
  • Tom Glenn M.
  • McManus James V.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist
인용정보 피인용 횟수 : 80  인용 특허 : 0

초록 ▼

A process system with an integrated gas storage and delivery unit comprising an adsorption-desorption apparatus, for storage and dispensing of a gas wherein the gas is dispensed by pressure differential desorption of the sorbate gas from the sorbent material. A motive fluid driver, e.g., a pump, blo

대표청구항 ▼

[ What is claimed is:] [1.] A process for storage and dispensing of a gas sorbable on a solid-phase physical sorbent medium, said process comprising:providing a storage and dispensing vessel holding a solid-phase physical sorbent medium;adsorbing said gas on said solid-phase physical sorbent medium

이 특허를 인용한 특허 (80)

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