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Level control systems for high purity chemical delivery systems 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F17C-013/00
출원번호 US-0485968 (1995-06-07)
발명자 / 주소
  • Siegele Stephen H.
  • Noah Craig M.
  • Gregg John N.
출원인 / 주소
  • Advanced Delivery & Chemical Systems, Inc.
대리인 / 주소
    Lyon & Lyon
인용정보 피인용 횟수 : 43  인용 특허 : 22

초록

A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that

대표청구항

[ We claim:] [11.] A level control system comprising a refillable ampule;a bulk container for containing a high purity source chemical;a refill line interposed between and communicating with said ampule and said bulk container for transferring the high purity source chemical from said bulk container

이 특허에 인용된 특허 (22)

  1. Smith Dresden G. (1621 English Dr. San Jose CA 95129), Air and water volume control apparatus for hydropneumatic tanks.
  2. Geatz Tobin (Durham NC), Apparatus and method for the transfer and delivery of high purity chemicals.
  3. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  4. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  5. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf Ha, Chemical refill system.
  6. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randtke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf H, Chemical refill system.
  7. Keltner Robert L. (Scurry TX) Ferguson Jim B. (Arlington TX), Cutoff switch for refrigerant container.
  8. Sawada Ryoji (Mori JPX) Yamamoto Satoshi (Mori JPX), Fluid level indicator for small watercraft.
  9. Morales Gerald A. (Simi Valley CA), Jet level sensor for fuel tanks.
  10. McKiernan Edward (Big Prairie OH) Bailey Ronald J. (Big Prairie OH) Sigler James A. (Big Prairie OH), Level indicating in vehicle holding tanks.
  11. Senghaas Karl A. (434 Forrest Hill San Antonio TX 78209) Senghaas Peter (334 Olney San Antonio TX 78209), Liquid level measuring apparatus.
  12. Bongort Edgar A. (Southfield MI) Cruickshank William T. (Pontiac MI), Liquid level sensor.
  13. Bongort Edgar A. (Southfield MI) Cruickshank William T. (Pontiac MI), Liquid level sensor.
  14. Miyazaki Shinji (Yokohama JPX) Tsunashima Yoshitaka (Tokyo JPX), Liquid source container device.
  15. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA), Liquid source material container and method of use for semiconductor device manufacturing.
  16. Yamazaki Masahiro (Yokohama JPX) Iizuka Shigeru (Yokohama JPX) Kamiya Shigemitsu (Kawasaki JPX) Oka Yoshiro (Yokohama JPX) Fujino Katsuhiro (Yokohama JPX), Method and apparatus for feeding drug liquid from hermetic returnable can.
  17. Jones Michael E. (Barsted GB3) Kenward Andrew J. (London GB3), Method of and apparatus for packaging a beverage in a container.
  18. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA), Method of shipping and using semiconductor liquid source materials.
  19. Rowe ; Jr. Edward A. (North Perry OH), Process for removing undesirable substances from electrical devices.
  20. Randtke Peter T. (La Costa CA) Graf Hans-Juergen (Oceanside CA), Ultra high purity reagent container with large breakseal.
  21. McMenamin Joseph C. (Oceanside CA), Vapor mass flow control system.
  22. Foster Leonard W. (Richardson TX) Millis Edwin G. (Dallas TX), Vented vacuum semiconductor wafer cassette.

이 특허를 인용한 특허 (43)

  1. Blatt, Christopher S.; Pearce, Richard H.; Williams, Graham; Wentworth, III, Edward H., Automatic refill system for ultra pure or contamination sensitive chemicals.
  2. Christopher S. Blatt ; Richard H. Pearce ; Graham Williams GB; Edward H. Wentworth, III, Automatic refill system for ultra pure or contamination sensitive chemicals.
  3. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J., Bubbler for substrate processing.
  4. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J., Bubbler for substrate processing.
  5. Birtcher, Charles Michael; Martinez, Martin Castaneda; Steidl, Thomas Andrew; Vivanco, Gil; Silva, David James, Cabinet for chemical delivery with solvent purging.
  6. Birtcher,Charles Michael; Martinez,Martin Castaneda; Steidl,Thomas Andrew; Vivanco,Gil; Silva,David James, Cabinet for chemical delivery with solvent purging and removal.
  7. Jackson Robert M., Chemical cabinet employing air flow baffles.
  8. Jackson Robert M. ; Esser Craig ; Serdahl Eric ; Gregg John N., Chemical delivery system employing containment crate.
  9. Gregg John N. ; Noah Craig M. ; Jackson Robert M., Chemical delivery system having purge system utilizing multiple purge techniques.
  10. Gregg John N. ; Noah Craig M. ; Jackson Robert M., Chemical delivery system having purge system utilizing multiple purge techniques.
  11. Gregg John N. ; Noah Craig M. ; Jackson Robert M., Chemical delivery system having purge system utilizing multiple purge techniques.
  12. John N. Gregg ; Craig M. Noah ; Robert M. Jackson, Chemical delivery system having purge system utilizing multiple purge techniques.
  13. Birtcher Charles Michael ; Steidl Thomas Andrew ; Martinez Martin Castaneda ; Hamidi Jamshid Jay, Chemical delivery system with ultrasonic fluid sensors.
  14. Gregg, John N.; Harris, Gregory W.; Cook, Frank L.; Jackson, Robert M., Container chemical guard.
  15. Boucher, Guillaume, Device for closing and connecting to external conduits a reservoir of cryogenic fluid, and reservoir provided with such a device.
  16. Kouri, Sr., Matthew D., Fluid reservoir level detection system.
  17. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  18. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  19. Husain, M. Kaja Aliar, Fuel sender with reed switch and latching magnets.
  20. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  21. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  22. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  23. Marek, John P., Lubrication system and method of control.
  24. Gaugush, Susan J.; Loeffelholz, Ted J.; Blubaugh, James Frances; Long, Douglas D., Lubrication system level control.
  25. Gregg, John N.; Battle, Scott L.; Banton, Jeffrey I.; Naito, Donn K.; Laxman, Ravi, Method and apparatus to help promote contact of gas with vaporized material.
  26. Gregg, John N.; Battle, Scott L.; Banton, Jeffrey I.; Naito, Donn K.; Laxman, Ravi K., Method and apparatus to help promote contact of gas with vaporized material.
  27. Gregg, John N.; Battle, Scott L.; Banton, Jeffrey I.; Naito, Donn K.; Laxman, Ravi K., Method and apparatus to help promote contact of gas with vaporized material.
  28. Gregg, John N.; Battle, Scott L.; Banton, Jeffrey I.; Naito, Donn K.; Laxman, Ravi K., Method and apparatus to help promote contact of gas with vaporized material.
  29. Gregg, John N.; Battle, Scott L.; Banton, Jeffrey I.; Naito, Donn K.; Laxman, Ravi K., Method and apparatus to help promote contact of gas with vaporized material.
  30. Gregg, John N.; Battle, Scott L.; Banton, Jeffrey I.; Naito, Donn K.; Laxman, Ravi K., Method and apparatus to help promote contact of gas with vaporized material.
  31. Gregg,John N.; Battle,Scott L.; Banton,Jeffrey I.; Naito,Donn K.; Laxman,Ravi K., Method and apparatus to help promote contact of gas with vaporized material.
  32. Shimizu, Akira; Kobayashi, Akiko; Kanayama, Hiroki, Method for controlling flow and concentration of liquid precursor.
  33. Silva,David James, Method for purging a high purity manifold.
  34. Jursich, Gregory M.; Sirk, Kevin, Optical monitoring processes and apparatus for combined liquid level sensing and quality control.
  35. Steidl, Thomas Andrew; Vivanco, Gildardo; Birtcher, Charles Michael, Purgeable container for low vapor pressure chemicals.
  36. Birtcher, Charles Michael; Martinez, Martin Castaneda; Steidl, Thomas Andrew; Vivanco, Gil; Silva, David James, Purgeable manifold for low vapor pressure chemicals containers.
  37. Chism, Richard D.; Krell, Andy, Refillable ampoule with purge capability.
  38. Calabrese, Ronald V., Self-calibrating liquid level transmitter.
  39. Calabrese,Ronald V., Self-calibrating liquid level transmitter.
  40. Calabrese,Ronald V., Self-calibrating liquid level transmitter.
  41. Cleary, John M.; Arno, Jose I.; Hendrix, Bryan C.; Naito, Donn; Battle, Scott; Gregg, John N.; Wodjenski, Michael J.; Xu, Chongying, Solid precursor-based delivery of fluid utilizing controlled solids morphology.
  42. Charles Michael Birtcher ; Robert Sam Zorich ; Thomas Andrew Steidl ; Gil Vivanco ; Cynthia Lee Trent ; David James Silva, Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals.
  43. Hancock,S. Lee; Dana,Peter H., System and method for locating points of interest using a portable phone.
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