초록 ▼

A substrate transfer apparatus for receiving and delivering a substrate among a plurality of process locations and transferring the substrate among the process locations comprises an apparatus body, a transfer member, movably provided on the apparatus body, for supporting and transferring the substr

A substrate transfer apparatus for receiving and delivering a substrate among a plurality of process locations and transferring the substrate among the process locations comprises an apparatus body, a transfer member, movably provided on the apparatus body, for supporting and transferring the substrate, the transfer member having a plurality of support portions for supporting the substrate at different positions in the same plane, moving mechanism for moving the transfer member for enabling the transfer member to receive and deliver the substrate, and switching mechanism for switching the position of the transfer member among a plurality of positions for receiving and delivering the substrate on the support portions.

대표청구항 ▼

[ What is claimed is:] [1.] A substrate transfer apparatus for receiving and delivering a substrate among a plurality of process locations and transferring the substrate among the process locations, said apparatus comprising:an apparatus body;a transfer arm member for supporting and transferring the

[ What is claimed is:] [1.] A substrate transfer apparatus for receiving and delivering a substrate among a plurality of process locations and transferring the substrate among the process locations, said apparatus comprising:an apparatus body;a transfer arm member for supporting and transferring the substrate, said transfer arm member having a first end which is supported by the apparatus body and a second end which is free, an a having supporting means capable of supporting said substrate at a plurality of different supporting positions on a same plane, wherein when said substrate is supported by one of said supporting means at one of said supporting positions, each remaining supporting means is out of contact with said substrate, and wherein said supporting positions are adjacent to each other, substrate regions of adjacent supporting positions partially overlap with each other, with each substrate region corresponding to a region occupied by a substrate disposed in one of said supporting positions, and said supporting means has a first and a second support portion for supporting said substrate at positions opposing each other of a circumferential portion of said substrate;moving means for moving the transfer arm member for enabling the transfer arm member to receive and deliver the substrate; andswitching means for horizontally shifting the transfer arm member in said same plane, thereby moving the first support portion and the second support portion between said plurality of different supporting positions for receiving and delivering the substrate on said supporting means.