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A surface inspection system and methods of inspecting a surface of a workpiece are provided for detecting particles, defects, or other surface characteristics in or on a surface of the workpiece. The surface inspection system preferably has a transporter arranged for transporting a workpiece along a

A surface inspection system and methods of inspecting a surface of a workpiece are provided for detecting particles, defects, or other surface characteristics in or on a surface of the workpiece. The surface inspection system preferably has a transporter arranged for transporting a workpiece along a material path and a rotator associated with the transporter and arranged for rotating a workpiece during translational travel along the material path. A scanner is positioned and arranged for scanning a surface of a workpiece during rotational and translational travel along the material path. The scanner preferably includes a light source arranged to generate a light beam therefrom and a deflector positioned to receive the light beam and arranged for deflecting the light beam along a predetermined scan path across a surface of the workpiece as the workpiece rotationally and translationally travels along the material path. A collector also is preferably arranged for collecting light specularly reflected and scattered from the surface of the workpiece during rotational and translational travel along the material path.

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[ That which is claimed:] [1.] A surface inspection system for detecting particles or defects on a surface of a workpiece, the surface inspection system comprising:means for translationally transporting a workpiece along a material path;means associated with said transporting means for rotating a wo

[ That which is claimed:] [1.] A surface inspection system for detecting particles or defects on a surface of a workpiece, the surface inspection system comprising:means for translationally transporting a workpiece along a material path;means associated with said transporting means for rotating a workpiece during translational travel along the material path;a scanner positioned and arranged to scan a surface of a workpiece during rotational and translational travel along the material path, said scanner including a light source arranged to generate a light beam therefrom and means positioned to receive the light beam and arranged for scanning the light beam along a predetermined scan path across a surface of the workpiece as the workpiece rotationally and translationally travels along the material path; anda collector arranged for collecting light reflected and scattered from the surface of the workpiece during rotational and translational travel along the material path, said collector comprising:a light channel detector arranged for detecting light specularly reflected from the surface of a workpiece; anda dark channel detector positioned adjacent said light channel detector for detecting light scattered from the surface of a workpiece, said dark channel detector including a plurality of collectors positioned closely adjacent each other and arranged for collecting components of the scattered light at different respective predetermined angles from the surface of the workpiece.