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Fabrication of polycrystalline thin films by pulsed laser processing 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/18
  • H01L-031/04
출원번호 US-0154347 (1993-11-18)
발명자 / 주소
  • Mitlitsky Fred
  • Truher Joel B.
  • Kaschmitter James L.
  • Colella Nicholas J.
출원인 / 주소
  • Regents of the University of California
대리인 / 주소
    Carnahan
인용정보 피인용 횟수 : 77  인용 특허 : 0

초록 ▼

A method for fabricating polycrystalline thin films on low-temperature (or high-temperature) substrates which uses processing temperatures that are low enough to avoid damage to the substrate, and then transiently heating select layers of the thin films with at least one pulse of a laser or other ho

대표청구항 ▼

[ We claim:] [1.] A method for fabricating polycrystalline thin films including the steps of:forming a film of material on a substrate in a time period such that the temperature of the substrate is not raised above a temperature of about 450.degree. C. for a time period greater than about 100 .mu.s;

이 특허를 인용한 특허 (77)

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  8. Jenson,Mark Lynn, Continuous processing of thin-film batteries and like devices.
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  9. Jenson,Mark Lynn; Klaassen,Jody Jon; Weiss,Victor Henry; Yan,Jenn Feng, Device enclosures and devices with integrated battery.
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  13. Mazur, Eric; Shen, Mengyan, Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate.
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  14. Mazur, Eric; Shen, Mengyan, Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate.
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  15. Mazur,Eric; Shen,Mengyan, Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate.
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  16. Kim, Taeseok, Grain growth for solar cells.
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  20. Grace, Anthony J.; Drain, Kieran F.; Sasaki, Yukihiko, Hybrid display device.
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  23. Klaassen,Jody J., Lithium/air batteries with LiPON as separator and protective barrier and method.
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  25. Jenson, Mark L., Low-temperature fabrication of thin-film energy-storage devices.
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  26. Carey, III,James Edward; Mazur,Eric, Manufacture of silicon-based devices having disordered sulfur-doped surface layers.
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  27. Jenson, Mark L.; Klaassen, Jody J., Method and apparatus for integrated-circuit battery devices.
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  28. Jenson, Mark L.; Klaassen, Jody J., Method and apparatus for integrated-circuit battery devices.
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  29. Jenson,Mark L.; Weiss,Victor H., Method and apparatus for thin-film battery having ultra-thin electrolyte.
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  30. Huet, Stephanie; Juliet, Pierre; Ducros, Cedric; Sanchette, Frederic, Method for making a photovoltaic cell based on thin-film silicon.
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  31. Kian, Kouroche; Heydarpour, Ramin, Method for patterning a multilayered conductor/substrate structure.
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  32. Kian, Kouroche; Heydarpour, Ramin, Method for patterning a multilayered conductor/substrate structure.
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  33. Kian, Kouroche; Heydarpour, Ramin, Method for patterning a multilayered conductor/substrate structure.
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  34. He, Xiao-Ming; Heydarpour, Ramin, Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films.
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  35. Jenson, Mark Lynn, Method of continuous processing of thin-film batteries and like devices.
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  36. Munir D. Naeem ; Lawrence A. Clevenger, Method of forming nano-scale structures from polycrystalline materials and nano-scale structures formed thereby.
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  37. Grace, Anthony J.; Drain, Kieran F.; Sasaki, Yukihiko, Method of making a hybrid display device having a rigid substrate and a flexible substrate.
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  38. Markle David A. ; Talwar Somit ; Hawryluk Andrew M., Methods for determining wavelength and pulse length of radiant energy used for annealing.
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  40. Tiwari, Ashutosh; Karmarkar, Makarand; Gray, Nathan Wheeler, PIN structures including intrinsic gallium arsenide, devices incorporating the same, and related methods.
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  46. Pralle, Martin U.; McKee, Jeffrey; Sickler, Jason, Pixel isolation elements, devices and associated methods.
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  47. Pralle, Martin U.; McKee, Jeffrey; Sickler, Jason, Pixel isolation elements, devices and associated methods.
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  48. Pralle, Martin U.; McKee, Jeffrey; Sickler, Jason, Pixel isolation elements, devices, and associated methods.
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  49. Kimura,Yoshinobu; Kamo,Takahiro; Kaneko,Yoshiyuki, Polysilicon semiconductor thin film substrate, method for producing the same, semiconductor device, and electronic device.
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  50. Haddad, Homayoon; McKee, Jeffrey; Jiang, Jutao; Miller, Drake; Palsule, Chintamani; Forbes, Leonard, Process module for increasing the response of backside illuminated photosensitive imagers and associated methods.
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  51. Haddad, Homayoon; McKee, Jeffrey; Jiang, Jutao; Miller, Drake; Palsule, Chintamani; Forbes, Leonard, Process module for increasing the response of backside illuminated photosensitive imagers and associated methods.
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  52. Read, John B.; Sweeney, Daniel C., Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices.
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  53. Sweeney, Daniel C.; Read, John B., Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices.
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  54. Vineis, Christopher; Carey, James; Li, Xia, Semiconductor devices having reduced substrate damage and associated methods.
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  57. Taketomi, Yoshinao; Kuramasu, Keizaburo; Izuchi, Masumi; Satani, Hiroshi; Tsutsu, Hiroshi; Nishitani, Hikaru; Nishitani, Mikihiko; Goto, Masashi; MIno, Yoshiko, Semiconductor thin film, method of producing the same, apparatus for producing the same, semiconductor device and method of producing the same.
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  59. Haddad, Homayoon; Jiang, Jutao, Shallow trench textured regions and associated methods.
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  60. Mazur, Eric; Carey, III, James E., Silicon-based visible and near-infrared optoelectric devices.
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  61. Mazur, Eric; Carey, III, James E., Silicon-based visible and near-infrared optoelectric devices.
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  62. Mazur, Eric; Carey, James Edward, Silicon-based visible and near-infrared optoelectric devices.
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  63. Mazur, Eric; Carey, James Edward, Silicon-based visible and near-infrared optoelectric devices.
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  64. Mazur, Eric; Carey, James Edward, Silicon-based visible and near-infrared optoelectric devices.
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  65. Mazur,Eric; Carey, III,James Edward, Silicon-based visible and near-infrared optoelectric devices.
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  66. Campbell, James P; Campbell, Harry R; Campbell, Ann B; Farber, Joel F, Solar cell method of fabrication via float glass process.
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  67. Jenson,Mark L.; Klaassen,Jody J.; Sullivan,Jim; Lemaire,Charles A.; Billion,Richard E., Solid state MEMS activity-activated battery device and method.
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  68. Klaassen, Jody J., Thin-film batteries with polymer and LiPON electrolyte layers and method.
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  69. Jenson,Mark L., Thin-film battery devices and apparatus for making the same.
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  70. Jenson,Mark Lynn; Weiss,Victor Henry, Thin-film battery having ultra-thin electrolyte.
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  71. Jenson,Mark Lynn; Weiss,Victor Henry, Thin-film battery having ultra-thin electrolyte and associated method.
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  72. Haddad, Homayoon; Feng, Chen; Forbes, Leonard, Three dimensional imaging utilizing stacked imager devices and associated methods.
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  73. Jiang, Jutao; McKee, Jeffrey; Haddad, Homayoon; Hong, Chris Sungkwon, Three dimensional sensors, systems, and associated methods.
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  74. Campbell James P. ; Galyean Eric W. ; Spreckman Harvey R., Transparent solar cell and method of fabrication.
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  75. Campbell, James P., Transparent solar cell and method of fabrication.
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  76. Campbell, James P; Campbell, Harry R; Campbell, Ann B; Farber, Joel F, Transparent solar cell method of fabrication via float glass process.
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  77. Campbell, Ann B; Farber, Joel F; Campbell, Harry R; Campbell, James P, Variable optical density solar collector.
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