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Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16L-003/00
  • F16L-055/00
  • F17D-001/02
  • C23C-016/00
출원번호 US-0612731 (1996-03-08)
발명자 / 주소
  • Barr Thomas Aloysius
  • Barr Christopher Velton
  • Elliott James Charles
  • Frew Dirk Alan
출원인 / 주소
  • Control Systems, Inc.
인용정보 피인용 횟수 : 106  인용 특허 : 0

초록 ▼

A mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood

대표청구항 ▼

[ What is claimed is:] [1.] A mount system to align and support gas stick semiconductor process gas delivery and regulation components along a common axis, said mount comprising:an elongate support member having a first end, a second end, an intermediate section therebetween, and a longitudinal axis

이 특허를 인용한 특허 (106)

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