[특허]Three-dimensional shape measuring apparatus

Three-dimensional shape measuring apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01B-011/24
출원번호	US-0721051 (1996-09-26)
우선권정보	JP-0094682 (1996-03-26)
발명자 / 주소	Ishihara Mitsuhiro,JPX
출원인 / 주소	Takaoka Electric Mtg. Co., Ltd., JPX
대리인 / 주소	Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보	피인용 횟수 : 116 인용 특허 : 0

초록 ▼

A three-dimensional shape measuring apparatus using a confocal imaging system wherein an image processor estimates the position from which the intensity of the reflected light for each pixel of the confocal image becomes maximum by interpolation of a value from the curve of the relationship between

대표청구항 ▼

[ What is claimed is:] [1.] A three-dimensional shape measuring apparatus using an arrayed confocal imaging system comprising:an arrayed confocal imaging system;means for changing the relative distance in the Z direction between an object and the object-position-in-focus; andan image processor which calculates the three-dimensional shape of the object from confocal images acquired at different relative distances in the Z direction between an object and the object-position-in-focus by the arrayed confocal imaging system and the means for changing the relative distance in the Z direction between an object and the object-position-in-focus;characterized in that said arrayed confocal imaging system comprises:a light source which emits illuminating light;a light path diverging optical element which causes the path of the illuminating light and the path of the reflected light to diverge;a microlens array provided with a large number of two-dimensionally arranged microlenses each of which converges the illuminating light coming out from the light path diverging optical element into a small spot;a pinhole array provided with a large number of pinholes which are disposed at the focal point of the corresponding microlenses of the microlens array;an objective lens which converges the illuminating light that passes through the pinholes of the pinhole array toward an object and converges the reflected light from the object toward the pinhole array;a two-dimensional photoelectric sensor which receives the reflected light that passes through the pinholes of the pinhole array and then through the corresponding microlenses of the microlens array and is deflected thereto by the light path diverging optical element, and converts the received light into electricity of an amount proportional to the intensity of the received light; andan image forming section which is disposed between the light path diverging optical element and the two-dimensional photoelectric sensor to form an image of the microlenses of the microlens array on the corresponding elements of the two-dimensional photoelectric sensor.

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Three-dimensional shape measuring apparatus 원문보기

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