[특허]Membrane for holding a probe tip in proper location

Membrane for holding a probe tip in proper location 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01R-031/02
출원번호	US-0553069 (1995-11-03)
발명자 / 주소	Kister January Lobacz Jerzy
출원인 / 주소	Probe Technology
대리인 / 주소	Lumen Intellectual Property Services
인용정보	피인용 횟수 : 129 인용 특허 : 0

초록 ▼

A method and device for accurately mounting a probe in a probe card and for maintaining correct location of the probe tip as the probe is used for electronic testing of an IC pad. A membrane having a slot is attached to a support structure of a probe card. The probe tip is inserted into the slot and the probe is affixed to the membrane at the edges of the slot using silicon rubber. The probe is then mounted in the support structure which has a groove for receiving the probe. A distal end of the probe is bonded to the walls of the groove so that the probe is free to move vertically in the groove, but constrained from moving laterally to prevent side-buckling. The membrane and silicon rubber hold the probe tip in proper location during thermal treating of the probe card assembly. Once mounted in the probe card by this method, the probe and probe tip will maintain proper location as they are used for electronic testing of an IC pad. During testing, the probe tip and attached membrane are deflected from their initial position by force of contact with the IC pad. Upon completion of the test, the contact force is removed from the probe tip. The elasticity of the membrane causes the membrane and the attached probe tip to return to their initial position, ensuring that the probe tip is in the proper location for the next test.

대표청구항 ▼

[ We claim:] [1.] A device for electronic testing, the device comprising:a) a cantilever probe having an arm, a tip, and a distal end opposite the tip;b) a support structure for supporting the probe, the probe being attached to the support structure at the distal end;c) a membrane for positioning the tip, the membrane being attached to the support structure and the membrane having a slot through which the tip is inserted; andd) a means for attaching the probe to the membrane such that the tip, the arm, and the membrane move from an initial position to a deflected position when an overdrive is applied to the tip and such that the tip, the arm, and the membrane return to the initial position when the overdrive is removed from the tip.

이 특허를 인용한 특허 (129)

Strid, Eric; Gleason, K. Reed, Active wafer probe.
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Agarwal, Vishnu K.; Sandhu, Gurtej S., Boron incorporated diffusion barrier material.
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Agarwal,Vishnu K.; Sandhu,Gurtej S., Boron incorporated diffusion barrier material.
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Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
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Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
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Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
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Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
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Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
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Hu,Yungjun Jeff, Conductive material for integrated circuit fabrication.
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Root, Bryan J.; Funk, William A., Electrical, high temperature test probe with conductive driven guard.
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Root,Bryan J.; Funk,William A., Electrical, high temperature test probe with conductive driven guard.
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McNair Michael P. ; Redondo Louis H. ; Dimitropoulos Nicholas M. ; Meirhofer Donald A., Electronic test probe interface assembly and method of manufacture.
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Parrish Frank, High density printed circuit board.
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Kister, January, Layered probes with core.
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Kister, January, Low profile probe having improved mechanical scrub and reduced contact inductance.
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Tervo,Paul A.; Cowan,Clarence E., Low-current pogo probe card.
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Tervo,Paul A.; Cowan,Clarence E., Low-current pogo probe card.
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Schwindt,Randy J., Low-current probe card.
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Gleason, K. Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing method using improved contact.
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Gleason, Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing method using improved contact.
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Gleason, K. Reed; Smith, Kenneth R.; Bayne, Mike, Membrane probing structure with laterally scrubbing contacts.
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Gleason, Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing system.
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Gleason, Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing system.
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Gleason,Reed; Bayne,Michael A.; Smith,Kenneth; Lesher,Timothy; Koxxy,Martin, Membrane probing system.
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Gleason,Reed; Bayne,Michael A.; Smith,Kenneth; Lesher,Timothy; Koxxy,Martin, Membrane probing system.
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Smith,Kenneth; Gleason,Reed, Membrane probing system.
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Smith,Kenneth; Gleason,Reed, Membrane probing system.
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Tervo, Paul A.; Smith, Kenneth R.; Cowan, Clarence E.; Dauphinais, Mike P.; Koxxy, Martin J., Membrane probing system.
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Tervo,Paul A.; Smith,Kenneth R.; Cowan,Clarence E.; Dauphinais,Mike P.; Koxxy,Martin J., Membrane probing system.
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Gleason, K. Reed; Smith, Kenneth R.; Bayne, Mike, Membrane probing system with local contact scrub.
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Smith, Kenneth R., Method of replacing an existing contact of a wafer probing assembly.
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Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Microelectronic contact structure.
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Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Microelectronic contact structure and method of making same.
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Kister, January, Multiple contact probes.
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Kister, January, Multiple contact probes.
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Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Probe card assembly and kit, and methods of making same.
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Ni, Cheng-Chin; Chen, Kun-Chou, Probe card assembly and test probes therein.
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Tatematsu,Tsutomu; Togashi,Kenji; Nanbu,Tetsuhiro; Ishihara,Shigenobu; Hamada,Morihiko; Arisaka,Yoshikazu; Itagaki,Kunihiro; Aoki,Shigekazu, Probe card, having cantilever-type probe and method.
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Kister, January, Probe cards employing probes having retaining portions for potting in a potting region.
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Gleason, Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Probe construction using a recess.
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Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.
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Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.
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Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.
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Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.
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Campbell,Richard L.; Andrews,Michael; Bui,Lynh, Probe for high frequency signals.
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Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Probe for testing a device under test.
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Smith, Kenneth; Jolley, Michael; Van Syckel, Victoria, Probe head having a membrane suspended probe.
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Smith,Kenneth; Jolley,Michael; Van Syckel,Victoria, Probe head having a membrane suspended probe.
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Schwindt,Randy, Probe holder for testing of a test device.
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Kister, January; Shtarker, Alex, Probe retention arrangement.
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Kister, January; Shtarker, Alex, Probe retention arrangement.
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Kister, January, Probe skates for electrical testing of convex pad topologies.
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Root, Bryan J., Probe tile for probing semiconductor wafer.
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Root, Bryan J., Probe tile for probing semiconductor wafer.
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Root, Bryan J., Probe tile for probing semiconductor wafer.
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Root,Bryan J., Probe tile for probing semiconductor wafer.
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Root,Bryan J., Probe tile for probing semiconductor wafer.
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Portune, Richard Alan, Probe tip to device pad alignment in obscured view probing applications.
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Kister, January, Probes with high current carrying capability and laser machining methods.
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Kister, January, Probes with offset arm and suspension structure.
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Smith, Kenneth R.; Hayward, Roger, Probing apparatus with impedance optimized interface.
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Smith, Kenneth R., Replaceable coupon for a probing apparatus.
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Root, Bryan J.; Funk, William A., Replaceable probe apparatus for probing semiconductor wafer.
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Root, Bryan J.; Funk, William A., Replaceable probe apparatus for probing semiconductor wafer.
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Root, Bryan J.; Funk, William A., Shielded probe apparatus for probing semiconductor wafer.
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Root,Bryan J.; Funk,William A., Shielded probe apparatus for probing semiconductor wafer.
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Root,Bryan J.; Funk,William A., Shielded probe apparatus for probing semiconductor wafer.
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Gleason, K. Reed; Lesher, Tim; Strid, Eric W.; Andrews, Mike; Martin, John; Dunklee, John; Hayden, Leonard; Safwat, Amr M. E., Shielded probe for testing a device under test.
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Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.
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Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.
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Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.
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Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.
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Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe for testing a device under test.
상세보기
Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe for testing a device under test.
상세보기
Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe with low contact resistance for testing a device under test.
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Kister, January, Space transformers employing wire bonds for interconnections with fine pitch contacts.
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Andrews, Peter; Hess, David, System for testing semiconductors.
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Campbell, Richard, Test structure and probe for differential signals.
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Campbell,Richard, Test structure and probe for differential signals.
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Kister, January, Vertical guided layered probe.
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Kister, January, Vertical guided probe array providing sideways scrub motion.
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Kister, January, Vertical probe array arranged to provide space transformation.
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Kister, January, Vertical probe array arranged to provide space transformation.
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Hayden, Leonard; Martin, John; Andrews, Mike, Wafer probe.
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Campbell, Richard, Wideband active-passive differential signal probe.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Membrane for holding a probe tip in proper location 원문보기

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이 특허를 인용한 특허 (129)

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Membrane for holding a probe tip in proper location 원문보기

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