초록 ▼

Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable close

Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

대표청구항 ▼

[ What is claimed is:] [4.] An electronic substrate processing system including a substrate cleaning system, said cleaning system including, in combination:at least one cassette for holding substrates to be processed;a housing enclosing the substrate cleaning system, said housing including a cassett

[ What is claimed is:] [4.] An electronic substrate processing system including a substrate cleaning system, said cleaning system including, in combination:at least one cassette for holding substrates to be processed;a housing enclosing the substrate cleaning system, said housing including a cassette carry-in device for receiving said at least one cassette in the housing; and a means for transporting the cassette away from the carry-in device and along the cleaning system;said cleaning system including cassette liquid cleaning and drying devices;a gas purging system in the housing, said purging system including a device for receiving a cleaned and dried cassette following a liquid cleaning and drying process carried out by the cleaning system; a closed portable container delivery system; and means for assembling a closed portable container around said at least one cassette so as to enclose the cassette; a gas purging apparatus for purging the interior of the portable container containing the said at least one cassette with an inert gas, and means for closing the portable container with the enclosed at least one cassette in sealed purged condition; said housing including a carry-out opening for enabling removal of the portable container containing the at least one cassette from the housing.