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End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-065/00
출원번호 US-0569760 (1995-12-08)
발명자 / 주소
  • Marohl Dan A.
  • Ngan Kenny King-Tai
출원인 / 주소
  • Applied Materials, Inc.
대리인 / 주소
    Fulbright & Jaworski, L.L.P.Denko
인용정보 피인용 횟수 : 103  인용 특허 : 2

초록

An end effector for a transfer robot used in connection with the manufacture of semiconductor wafers is provided. The end effector is designed to handle very thin (0.005"-0.010") semiconductor wafers which tend to bow during processing. The robot blade or end effector includes a deep pocket for rece

대표청구항

[ I claim:] [1.] An end effector for an article transfer device comprising:a rear support mechanism for attaching the end effector to the article transfer device;a pocket extending forward from a front edge of the rear support mechanism for receiving an article therein;wafer capture shoes projecting

이 특허에 인용된 특허 (2)

  1. Maydan Dan (Los Altos Hills CA) Somekh Sasson (Redwood City CA) Wang David N. (Cupertino CA) Cheng David (San Jose CA) Toshima Masato (San Jose CA) Harari Isaac (Mountain View CA) Hoppe Peter D. (Sun, Multi-chamber integrated process system.
  2. Akimoto Masami (Kikuyo JPX) Kimura Yoshio (Kumamoto JPX) Hirakawa Osamu (Kumamoto JPX) Anai Noriyuki (Kumamoto JPX) Tateyama Masanori (Kumamoto JPX) Sakamoto Yasuhiro (Kumamoto JPX), Resist process apparatus.

이 특허를 인용한 특허 (103)

  1. Powers, Kelly B., Access port identification systems and methods.
  2. Powers, Kelly B., Access port identification systems and methods.
  3. Powers, Kelly B., Access port identification systems and methods.
  4. Powers, Kelly B.; Stats, Jason R., Access port identification systems and methods.
  5. Powers, Kelly B.; Stats, Jason R., Access port identification systems and methods.
  6. Powers, Kelly B.; Stats, Jason R., Access port identification systems and methods.
  7. Powers, Kelly B.; Stats, Jason R.; Burnside, Eddie K., Access port identification systems and methods.
  8. Berger, Alexander J.; Kretz, Frank E., Alignment of semiconductor wafers and other articles.
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  10. Berger,Alexander J.; Kretz,Frank E., Alignment of semiconductor wafers and other articles.
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  12. Soucy, Alan J.; Castantini, James S., Apparatus and methods for handling semiconductor wafers.
  13. Berger, Alexander J.; Kretz, Frank E.; Casarotti, Sean A., Article holders and article positioning methods.
  14. Kretz, Frank E.; Berger, Alexander J.; Casarotti, Sean A., Article holders with sensors detecting a type of article held by the holder.
  15. Kretz,Frank E.; Berger,Alexander J.; Casarotti,Sean A., Article holders with sensors detecting a type of article held by the holder.
  16. Kretz, Frank E.; Berger, Alexander J.; Casarotti, Sean A., Articles holders with sensors detecting a type of article held by the holder.
  17. Powers, Kelly B.; Beasley, Jim C.; Rome, Guy, Assemblies for identifying a power injectable access port.
  18. Powers, Kelly B.; Beasley, Jim C.; Rome, Guy T., Assemblies for identifying a power injectable access port.
  19. Powers, Kelly B.; Beasley, Jim C.; Sheetz, Kevin W.; Lowe, Matthew M.; Burnside, Eddie K.; Gerondale, Jay, Assemblies for identifying a power injectable access port.
  20. Powers, Kelly B.; Beasley, Jim C.; Sheetz, Kevin W.; Lowe, Matthew M.; Burnside, Eddie K.; Gerondale, Jay, Assemblies for identifying a power injectable access port.
  21. Powers, Kelly B.; Cise, David M.; Hibdon, Dwight T.; Evans, John G., Assemblies for identifying a power injectable access port.
  22. Powers, Kelly B.; Cise, David M.; Hibdon, Dwight T.; Evans, John G., Assemblies for identifying a power injectable access port.
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  28. Casarotti, Sean A.; Berger, Alexander J.; Kretz, Frank E., Detection and handling of semiconductor wafers and wafer-like objects.
  29. Casarotti,Sean A.; Berger,Alexander J.; Kretz,Frank E., Detection and handling of semiconductor wafers and wafer-like objects.
  30. Casarotti,Sean A.; Berger,Alexander J.; Kretz,Frank E., Detection and handling of semiconductor wafers and wafers-like objects.
  31. Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
  32. Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
  33. Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
  34. Marohl Dan A. ; Ngan Kenny King-Tai, End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector.
  35. Jeff Brodine ; Dan Marohl, End effector for wafer handler in processing system.
  36. Lee,Kuei Hung, End effector with tapered fingertips.
  37. Albert Wang, End-effector with integrated cooling mechanism.
  38. Mantz, Paul, Endeffectors for handling semiconductor wafers.
  39. Mantz, Paul, Endeffectors for handling semiconductor wafers.
  40. Mantz, Paul, Endeffectors for handling semiconductor wafers.
  41. Prechtel, Ericka; Thorne, David L., Extensible internal bolster for a medical device.
  42. Brodine, Jeffrey A.; Guerra, Domingo; Kroetz, Whitney B., High temperature anti-droop end effector for substrate transfer.
  43. Orome, Amir, Implantable access port.
  44. Trebella, Matthew R., Implantable access port.
  45. Wiley, Martha; Eliasen, Kenneth A.; Hibdon, Dwight T.; McKinnon, Melissa A.; Powers, Kelly B.; Cise, David M.; Maniar, Ketan K., Implantable access port including a sandwiched radiopaque insert.
  46. Hamatake, Bret; Evans, John G., Implantable medical devices including septum-based indicators.
  47. Hamatake, Bret; Evans, John G., Implantable medical devices including septum-based indicators.
  48. Felsenthal David ; Lee Chunghsin ; Sferlazzo Piero, In-line sputter deposition system.
  49. Draper, Matthew A.; Muse, Jay A.; Patterson, Ryan C.; Bjorklund, Russell L., Indicia informative of characteristics of insertable medical devices.
  50. Butts, David M.; Stats, Jason R., Infusion apparatuses and methods of use.
  51. Butts, David M.; Stats, Jason R.; Hamatake, Bret; Rome, Sandra J.; Shang, Walter H., Infusion apparatuses and methods of use.
  52. Beasley, Jim C.; Powers, Kelly B., Infusion apparatuses and related methods.
  53. Katsuhito Nishikawa ; Thomas F. Carlos, Linear robot.
  54. Kim, Kyung-Tae, Magnetic pad for end-effectors.
  55. De Ridder, Christianus Gerardus Maria, Method and system for loading substrate supports into a substrate holder.
  56. Ettinger, Gary C.; Khau, Michael E.; Shin, Ho Seon, Methods and apparatus for drying a substrate.
  57. Powers, Kelly B.; Beasley, Jim C.; Sheetz, Kevin W.; Gerondale, Jay; Rome, Guy, Methods of performing a power injection procedure including identifying features of a subcutaneously implanted access port for delivery of contrast media.
  58. Powers, Kelly B.; Rome, Guy T.; Evans, John G.; Hibdon, Dwight; Cise, David M., Methods of power injecting a fluid through an access port.
  59. Felsenthal David ; Lee Chunghsin ; Sferlazzo Piero, Multi-layer sputter deposition apparatus.
  60. Stevens Ronald R., Non-contact end effector.
  61. Wiley, Martha R.; Noyce, Jodie L.; Cise, David M.; Barron, William R.; Christian, Kelly J.; Orome, Amir, Overmolded access port including anchoring and identification features.
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  63. Wiley, Martha R.; Noyce, Jodie L.; Cise, David M.; Christian, Kelly J., Overmolded access port including anchoring and identification features.
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  73. Beasley, Jim C.; Burnside, Eddie K.; Gerondale, Jay; Tallarida, Steven; Powers, Kelly B., Septum feature for identification of an access port.
  74. Beasley, Jim C.; Burnside, Eddie K.; Gerondale, Jay D.; Tallarida, Steven J.; Powers, Kelly B., Septum including at least one identifiable feature, access ports including same, and related methods.
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  85. Sheetz, Kevin W.; Hamatake, Bret; Evans, John G.; Jenkins, Richard P.; Worthen, Sean M.; Minert, Loren R.; Hammond, Alisha M.; Farnworth, Charles L.; Powers, Kelly B., Systems and methods for identifying an access port.
  86. Maniar, Ketan K.; Worthen, Sean M.; Powers, Kelly B., Systems and methods for radiographically identifying an access port.
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  88. Maniar, Ketan K.; Worthen, Sean M.; Powers, Kelly B., Systems and methods for radiographically identifying an access port.
  89. Maniar, Ketan K.; Worthen, Sean M.; Powers, Kelly B., Systems and methods for radiographically identifying an access port.
  90. Powers, Kelly B.; Barron, William R., Systems and methods for radiographically identifying an access port.
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  92. Hartog,Edwin Den, Two level end effector.
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