초록 ▼

A frame body and a tuning fork-shaped vibratory element are made of a single crystalline silicon substrate. The vibratory element has arms extending parallel to each other. The respective sides of the frame body are located face to face with a predetermined distance from the arms. Thin portions are

A frame body and a tuning fork-shaped vibratory element are made of a single crystalline silicon substrate. The vibratory element has arms extending parallel to each other. The respective sides of the frame body are located face to face with a predetermined distance from the arms. Thin portions are formed between thick portions located partially on the arms of the vibratory element. Piezo-resistant elements for detecting angular velocity are disposed on the thin portions. When electrostatic force is imposed between the sides of the frame body and the arms, the arms are excited to vibrate. At this time, when angular velocity is imposed, the arms vibrate in the direction crossing at right angles with the excited direction. The piezo-resistant elements detect vibration of the arms caused by the angular velocity with stabilized characteristics and higher sensitivity.

대표청구항 ▼

[ What is claimed is:] [1.] An angular velocity sensor apparatus comprising:a vibratory element having arms in a tuning-fork shape extending parallel to each other, said vibratory element being composed of semiconductor substance, each of said arms having a thin portion disposed between thick portio

[ What is claimed is:] [1.] An angular velocity sensor apparatus comprising:a vibratory element having arms in a tuning-fork shape extending parallel to each other, said vibratory element being composed of semiconductor substance, each of said arms having a thin portion disposed between thick portions so that said arm is capable of bending at said thin portion in a direction perpendicular to a plane including said arms;an exciting means for exciting said vibratory element so that said arms of said vibratory element vibrate in an excitation direction in said plane and perpendicular to said arms; andstrain sensitive elements disposed on said thin portions of said respective arms, each of said strain sensitive elements detecting a bend of said respective arms responsive to an applied angular velocity.