$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Integrated circuit with active devices under bond pads 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/48
출원번호 US-0549990 (1995-10-30)
발명자 / 주소
  • Chittipeddi Sailesh
  • Cochran William Thomas
  • Smooha Yehuda
출원인 / 주소
  • Lucent Technologies Inc.
대리인 / 주소
    Rehberg
인용정보 피인용 횟수 : 98  인용 특허 : 0

초록

Active circuitry is placed under the bond pads in an integrated circuit having at least three metal levels. The metal level adjacent the bond pad level acts as a buffer and provides stress relief and prevents leakage currents between the bond pad and underlying circuitry.

대표청구항

[ We claim:] [1.] An integrated circuit comprising:a substrate;active devices formed on the surface of said substrate;a bond pad formed substantially over a portion of said active devices, said bond pad having a footprint;a patterned metal layer having a footprint and located between said bond pad a

이 특허를 인용한 특허 (98)

  1. Bhatt, Hemanshu; Vijay, Dilip; Pallinti, Jayanthi; Sun, Sey-Shing; Ying, Hong; Kao, Chiyi, Alternate pad structures/passivation inegration schemes to reduce or eliminate IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing.
  2. Chittipeddi Sailesh ; Ryan Vivian, Bond pad design for integrated circuits.
  3. Chittipeddi Sailesh ; Ryan Vivian, Bond pad design for integrated circuits.
  4. Chittipeddi Sailesh ; Ryan Vivian, Bond pad for a flip chip package, and method of forming the same.
  5. Chittipeddi Sailesh ; Ryan Vivian, Bond pad for a flip-chip package.
  6. Antol, Joze E.; Osenbach, John W.; Steiner, Kurt G., Bond pad support structure for semiconductor device.
  7. Edgar R. Zuniga ; Samuel A. Ciani, Bonding over integrated circuits.
  8. Efland,Taylor R., Circuit method integrating the power distribution functions of the circuits and leadframes into the chip surface.
  9. Efland, Taylor R., Circuit structure integrating the power distribution functions of circuits and leadframes into the chip surface.
  10. Patti, Davide Giuseppe, Contact pad.
  11. Liu, Chi Kang; Yu, Talee, Device under bonding pad using single metallization.
  12. Shu, William Kuang-Hua, Die pad crack absorption system and method for integrated circuit chip fabrication.
  13. Jeng, Shin-Puu; Hsu, Shih-Hsun, Die saw crack stopper.
  14. Chittipeddi, Sailesh; Cochran, William Thomas; Smooha, Yehuda, Dual damascene bond pad structure for lowering stress and allowing circuitry under pads.
  15. Yoshii, Masahito, Electro-optical device, wiring board, and electronic apparatus.
  16. Su, Chao-Yuan; Lin, Chung-Yi, Exclusion zone for stress-sensitive circuit design.
  17. Su, Chao-Yuan; Lin, Chung-Yi, Exclusion zone for stress-sensitive circuit design.
  18. Su, Chao-Yuan; Lin, Chung-Yi, Exclusion zone for stress-sensitive circuit design.
  19. Chen, Hsien-Wei; Liu, Yu-Wen; Sheu, Jyh-Cherng; Tsai, Hao-Yi; Jeng, Shin-Puu; Yu, Chen-Hua; Hou, Shang-Yun, Heat spreader structures in scribe lines.
  20. Akram Salman ; Farnworth Warren M. ; Wood Alan G., High density flip chip memory arrays.
  21. Akram, Salman; Farnworth, Warren M.; Wood, Alan G., High density flip chip memory arrays.
  22. Nakagawa, Kenji, IC bonding pad combined with mark or monitor.
  23. Righter,Alan W, Integrated circuit bond pad structures and methods of making.
  24. Righter,Alan W., Integrated circuit bond pad structures and methods of making.
  25. Marsanne,S��bastien; Le Briz,Olivier, Integrated circuit chip with external pads and process for fabricating such a chip.
  26. Ito, Satoru; Moriguchi, Masahiko; Maekawa, Kazuhiro; Itomi, Noboru; Kodaira, Satoru; Karasawa, Junichi; Kumagai, Takashi; Ishiyama, Hisanobu; Fujise, Takashi, Integrated circuit device and electronic instrument.
  27. Kumagai, Takashi; Ishiyama, Hisanobu; Maekawa, Kazuhiro; Ito, Satoru; Fujise, Takashi; Karasawa, Junichi; Kodaira, Satoru; Saiki, Takayuki; Takamiya, Hiroyuki, Integrated circuit device and electronic instrument.
  28. Kumagai, Takashi; Ishiyama, Hisanobu; Maekawa, Kazuhiro; Ito, Satoru; Fujise, Takashi; Karasawa, Junichi; Kodaira, Satoru; Saiki, Takayuki; Takamiya, Hiroyuki, Integrated circuit device and electronic instrument.
  29. Saiki, Takayuki; Ito, Satoru; Moriguchi, Masahiko, Integrated circuit device and electronic instrument.
  30. Saiki, Takayuki; Ito, Satoru; Moriguchi, Masahiko; Kumagai, Takashi; Ishiyama, Hisanobu; Fujise, Takashi; Karasawa, Junichi; Kodaira, Satoru; Maekawa, Kazuhiro, Integrated circuit device and electronic instrument.
  31. Vo, Nhat D.; Tran, Tu-Anh N.; Carpenter, Burton J.; Hong, Dae Y.; Miller, James W.; Phillips, Kendall D., Integrated circuit having pads and input/output (I/O) cells.
  32. Pozder,Scott K.; Hess,Kevin J.; Leung,Pak K.; Travis,Edward O.; Wilkerson,Brett P.; Wontor,David G.; Zhao,Jie Hua, Integrated circuit having structural support for a flip-chip interconnect pad and method therefor.
  33. Antol, Joze Eura; Osenbach, John William; Weachock, Ronald James, Integrated circuit package including wire bonds.
  34. Scheucher,Heimo, Integrated circuit with at least one bump.
  35. Benedetto Vigna IT; Enrico Maria Alfonso Ravanelli IT, Integrated electronic device comprising a mechanical stress protection structure.
  36. Vigna, Benedetto; Ravanelli, Enrico Maria Alfonso, Integrated electronic device comprising a mechanical stress protection structure.
  37. Ker, Ming-Dou; Jiang, Hsin-Chin, Low-capacitance bonding pad for semiconductor device.
  38. Ming-Dou Ker TW; Hsin-Chin Jiang TW, Low-capacitance bonding pad for semiconductor device.
  39. Richard C. Blish ; Colin D. Hatchard ; Ian Morgan ; Michael Fliesler, Method and apparatus for achieving bond pad crater sensing and ESD protection integrated circuit products.
  40. Hess, Kevin J.; Downey, Susan H.; Miller, James W.; Yong, Cheng Choi, Method and apparatus for providing structural support for interconnect pad while allowing signal conductance.
  41. Hess,Kevin J.; Downey,Susan H.; Miller,James W.; Yong,Cheng Choi, Method and apparatus for providing structural support for interconnect pad while allowing signal conductance.
  42. Gregory D. Sabin ; William J. Gross ; Jung-Yueh Chang, Method for relieving bond stress in an under-bond-pad resistor.
  43. Sabin, Gregory D.; Gross, William J.; Chang, Jung-Yueh, Method for relieving bond stress in an under-bond-pad resistor.
  44. Hermen Liu TW; Yimin Huang TW, Method of forming a bonding pad on a semiconductor chip.
  45. Chen,Sheng Hsiung, Method of improving copper pad adhesion.
  46. Lee, Jin Yuan; Chen, Ying Chih; Lin, Mou Shiung, Method of wire bonding over active area of a semiconductor circuit.
  47. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
  48. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
  49. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
  50. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
  51. Lee, Jin-Yuan; Chen, Ying-Chih; Lin, Mou-Shiung, Method of wire bonding over active area of a semiconductor circuit.
  52. Lee, Jin-Yuan; Chen, Ying-chih, Method of wire bonding over active area of a semiconductor circuit.
  53. Davison,Kerry Leeds; Hawk, Jr.,Donald Earl; Smooha,Yehuda, Methods and apparatus for integrated circuit device power distribution via internal wire bonds.
  54. Akram, Salman; Farnworth, Warren M.; Wood, Alan G., Methods of a high density flip chip memory arrays.
  55. Singh,Inderjit; Marks,Howard Lee; Greco,Joseph David, Pad over active circuit system and method with frame support structure.
  56. Singh,Inderjit; Marks,Howard Lee; Greco,Joseph David, Pad over active circuit system and method with meshed support structure.
  57. Hunter, Stevan G.; Rasmussen, Bryce A.; Ruud, Troy L., Pad over interconnect pad structure design.
  58. Sailesh Chittipeddi ; William Thomas Cochran ; Yehuda Smooha, Process for forming a dual damascene bond pad structure over active circuitry.
  59. Jeng, Shin-Puu; Chen, Hsien-Wei; Hou, Shang-Yun; Tsai, Hao-Yi; Wu, Anbiarshy N. F.; Liu, Yu-Wen, Protective seal ring for preventing die-saw induced stress.
  60. Archer, III, Vance D.; Ayukawa, Michael C.; Bachman, Mark A.; Chesire, Daniel P.; Kang, Seung H.; Kook, Taeho; Merchant, Sailesh M.; Steiner, Kurt G., Routing under bond pad for the replacement of an interconnect layer.
  61. Yu, Chen-Hua; Jeng, Shin-Puu; Tsai, Hao-Yi; Hou, Shang-Yun; Chen, Hsien-Wei; Chiu, Ming-Yen, Scribe line metal structure.
  62. Jeng, Shin-Puu; Hsu, Shih-Hsun; Hou, Shang-Yun; Tsai, Hao-Yi; Yu, Chen-Hua, Seal ring structure with improved cracking protection.
  63. Jeng, Shin-Puu; Hsu, Shih-Hsun; Hou, Shang-Yun; Tsai, Hao-Yi; Yu, Chen-Hua, Seal ring structure with improved cracking protection and reduced problems.
  64. Wu,Bing Chang, Semiconductor chip capable of implementing wire bonding over active circuits.
  65. Song, Young Hee; Choi, Il Heung; Kim, Jeong Jin; Sohn, Hae Jeong; Lee, Chung Woo, Semiconductor chip having bond pads.
  66. Song, Young Hee; Choi, Il Heung; Kim, Jeong Jin; Sohn, Hae Jeong; Lee, Chung Woo, Semiconductor chip having bond pads.
  67. Song, Young-Hee; Choi, Il-Heung; Kim, Jeong-Jin; Sohn, Hae-Jeong; Lee, Chung-Woo, Semiconductor chip having bond pads.
  68. Song,Young Hee; Choi,Il Heung; Kim,Jeong Jin; Sohn,Hae Jeong; Lee,Chung Woo, Semiconductor chip having bond pads.
  69. Song, Young Hee; Choi, Il Heung; Kim, Jeong Jin; Sohn, Hae Jeong; Lee, Chung Woo, Semiconductor chip having bond pads and multi-chip package.
  70. Song, Young-Hee; Choi, Il-Heung; Kim, Jeong-Jin; Sohn, Hae-Jeong; Lee, Chung-Woo, Semiconductor chip having bond pads and multi-chip package.
  71. Stecher, Matthias, Semiconductor component comprising copper metallizations.
  72. Ikuta,Teruhisa; Ogura,Hiroyoshi; Sato,Yoshinobu; Terashita,Toru; Ichijo,Hisao, Semiconductor device.
  73. Komatsu,Shigeyuki, Semiconductor device.
  74. Shin, Shiko; Saito, Takayuki; Horibe, Hiroshi, Semiconductor device.
  75. Tanaka Kazuo,JPX, Semiconductor device and a method for making the same that provide arrangement of a connecting region for an external connecting terminal.
  76. Tanaka, Kazuo, Semiconductor device and a method for making the same that provide arrangement of a connecting region for an external connecting terminal.
  77. Nonaka, Makoto, Semiconductor device and method of fabricating the same.
  78. Takemura, Koji; Hirano, Hiroshige; Takahashi, Masao; Sano, Hikari; Itoh, Yutaka; Koike, Koji, Semiconductor device having a pad and plurality of interconnects.
  79. Lee Sueng-Rok,KRX ; Kim Myung-Sung,KRX ; Lee Yunhee,KRX ; Kim Manjun,KRX, Semiconductor device having multi-layered pad and a manufacturing method thereof.
  80. Takemura, Koji; Hirano, Hiroshige; Takahashi, Masao; Sano, Hikari; Itoh, Yutaka; Koike, Koji, Semiconductor device having pads and which minimizes defects due to bonding and probing processes.
  81. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  82. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  83. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  84. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  85. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  86. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  87. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including a buffer layer structure for reducing stress.
  88. Yuzawa, Takeshi; Tagaki, Masatoshi, Semiconductor device including semiconductor chip, wiring, conductive material, and contact part.
  89. Takayoshi Andou JP; Hitoshi Ninomiya JP; Kinya Ohtani JP, Semiconductor device with the copper containing aluminum alloy bond pad on an active region.
  90. Lee Young-woo,KRX, Semiconductor devices having double pad structure.
  91. Maeda, Jun, Semiconductor integrated circuit having connection pads over active elements.
  92. Song,Young Hee; Choi,Il Heung; Kim,Jeong Jin; Sohn,Hae Jeong; Lee,Chung Woo, Semiconductor multi-chip package.
  93. Bauer,Robert; Ertle,Werner; Frohnm?ller,Till; Goller,Bernd; Greiderer,Reinhard; Nagler,Oliver; Schmeckebier,Olaf; Stadler,Wolfgang, Semiconductor structure integrated under a pad.
  94. Bachman, Mark A.; Bitting, Donald S.; Chittipeddi, Sailesh; Kang, Seung H.; Merchant, Sailesh M., Solder bump structure for flip chip semiconductor devices and method of manufacturing therefore.
  95. Fan,Zhang; Chao,Zhang Bei; Wuping,Liu; Liep,Chok Kho; Choo,Hsia Liang; Kheng,Lim Yeow; Cuthbertson,Alan; Boon,Tan Juan, Structure and method for fabricating a bond pad structure.
  96. Fan,Zhang; Chao,Zhang Bei; Wuping,Liu; Liep,Chok Kho; Choo,Hsia Liang; Kheng,Lim Yeow; Cuthbertson,Alan; Boon,Tan Juan, Structure and method for fabricating a bond pad structure.
  97. Madhani,Parag N.; Barnes,Paul F.; Hawk, Jr.,Donald E.; Prabakaran,Kandaswamy, Systems and methods for distributing I/O in a semiconductor device.
  98. Aoki,Toyohiro; Burrell,Lloyd G.; Sauter,Wolfgang, Wirebond crack sensor for low-k die.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로