[특허]Tunneling sensor with linear force rebalance and method for fabricating the same

Tunneling sensor with linear force rebalance and method for fabricating the same 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01P-015/00
출원번호	US-0694333 (1996-08-08)
발명자 / 주소	Bernstein Jonathan J.
출원인 / 주소	The Charles Stark Draper Laboratory, Inc.
대리인 / 주소	Weingarten, Schurgin, Gagnebin & Hayes LLP
인용정보	피인용 횟수 : 15 인용 특허 : 0

초록 ▼

A tunneling sensor is disclosed having a pair of force rebalance capacitors that are used in a push-pull relationship so as to provide a rebalance force that is a linear function of applied rebalance voltages, which leads to an output voltage that is linearly related to input acceleration. The tunneling sensor comprises a plate electrode that is formed from and attached to a silicon substrate by a pair of torsional flexures, which provide an axis of rotation for the plate electrode. A pendulous mass is formed on a first end of the plate electrode, and a tunnel-effect contact is formed on a second end of the plate electrode. A pair of torque rebalance bridge electrodes are formed on the substrate so as to span the plate electrode. A tunnel-effect tip is formed on the substrate so as to be proximate the tunnel-effect contact and in line with the rotational path that the tunnel-effect contact takes when the plate electrode is rotated.

대표청구항 ▼

[ What is claimed is:] [1.] A tunneling sensor with linear force rebalance, said tunneling sensor comprising:a substrate having an opening therein;a plate electrode disposed within said opening of said substrate and attached to said substrate via a pair of flexures disposed on opposite sides of said plate electrode in a manner providing for rotation of said plate electrode about an axis of rotation lying between a first and a second end of said plate electrode, said plate electrode being unbalanced about said axis of rotation and having a tunnel-effect contact formed thereon;a pair of co-planar torque rebalance bridge electrodes opposite one face of said plate electrode, a first torque rebalance bridge electrode in said pair being disposed proximate said first end of said plate electrode, a second torque rebalance bridge electrode in said pair being disposed proximate said second end of said plate electrode;a tunnel-effect tip, said tunnel-effect tip being disposed proximate said tunnel-effect contact;means for electrically biasing said tunnel-effect contact and said tunnel-effect tip;means for sensing a tunnel current between said tunnel-effect contact and said tunnel-effect tip; andfeedback means for processing said tunnel current and electrically exciting said pair of torque rebalance bridge electrodes with complementary rebalance voltages derived from said processed tunnel current so as to generate an electrostatic rebalance torque upon said plate electrode about said rotational axis that is linearly related to an imbalance torque experienced by said plate electrode about said rotational axis upon acceleration of said plate electrode in a direction normal thereto.

이 특허를 인용한 특허 (15)

Dimeo, Jr., Frank; Chen, Philip S. H.; Neuner, Jeffrey W.; Welch, James; Stawasz, Michele; Baum, Thomas H.; King, Mackenzie E.; Chen, Ing-Shin; Roeder, Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawacz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawasz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawasz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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Chen,Philip S. H.; Chen,Ing Shin; Dimeo, Jr.,Frank; Neuner,Jeffrey W.; Welch,James; Roeder,Jeffrey F., Apparatus and process for sensing target gas species in semiconductor processing systems.
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Kubena, Randy L.; Kirby, Deborah J., Dynamic damping in a quartz oscillator.
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Johnson,Burgess R., Force rebalancing for MEMS inertial sensors using time-varying voltages.
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Hulsing, II, Rand H.; Sprague, Randy, Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers.
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Rand H. Hulsing, II ; Randy Sprague, Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers.
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Hulsing ; II Rand H. ; Sprague Randy, Low metalization creep sensor.
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Rand H. Hulsing, II ; Randy Sprague, Low metalization creep sensor.
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Buchan Nicholas,DEX ; Muenzel Horst,DEX ; Laermer Franz,DEX ; Offenberg Michael,DEX ; Bischof Udo,DEX ; Lutz Markus,DEX, Method for manufacturing a rate-of-rotation sensor.
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Pedersen,Michael, Miniature acoustic detector based on electron surface tunneling.
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Dimeo, Jr.,Frank; Chen,Philip S. H.; Chen,Ing Shin; Neuner,Jeffrey W.; Welch,James, Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same.
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Kubena, Randall L.; Yong, Yook-Kong, Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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Tunneling sensor with linear force rebalance and method for fabricating the same 원문보기

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Tunneling sensor with linear force rebalance and method for fabricating the same 원문보기

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연구과제 타임라인

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이 특허를 인용한 특허 (15)

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