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Semiconductor device of a silicon on insulator metal-insulator type with a concave feature 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/01
  • H01L-027/12
  • H01L-031/0392
  • H01L-031/117
출원번호 US-0536451 (1995-09-29)
우선권정보 JP-0240337 (1995-09-19)
발명자 / 주소
  • Shigyo Naoyuki,JPX
  • Enda Toshiyuki,JPX
출원인 / 주소
  • Kabushiki Kaisha Toshiba, JPX
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 65  인용 특허 : 1

초록

A first silicon oxide layer serving as an insulation layer is formed on a p-type semiconductor substrate. An n.sup.+ -type source and drain regions are formed on the p-type substrate 110 with a spacing therebetween. A channel region is interposed between the source and drain regions. A second silico

대표청구항

[ What is claimed is:] [1.] A silicon on insulator type metal-insulator semiconductor device comprising:a pair of source and drain regions formed of high concentration impurity and provided in a semiconductor layer which is formed on an insulation layer formed on a semiconductor substrate; anda gate

이 특허에 인용된 특허 (1)

  1. Terashima Tomohide (Itami JPX), Dielectric element isolated semiconductor device and a method of manufacturing the same.

이 특허를 인용한 특허 (65)

  1. Lindert, Nick; Cea, Stephen M., Bulk non-planar transistor having strained enhanced mobility and methods of fabrication.
  2. Doyle, Brian S.; Jin, Been-Yih; Kavalieros, Jack T.; Datta, Suman; Brask, Justin K.; Chau, Robert S., CMOS devices with a single work function gate electrode and method of fabrication.
  3. Brask, Justin K.; Datta, Suman; Doczy, Mark L.; Blackwell, James M.; Metz, Matthew V.; Kavalieros, Jack T.; Chau, Robert S., Dielectric interface for group III-V semiconductor device.
  4. Bin Yu, Double gate transistor having a silicon/germanium channel region.
  5. Chau,Robert S.; Barlage,Doulgas; Jin,Been Yih, Field effect transistor and method of fabrication.
  6. Chau,Robert S.; Barlage,Doulgas; Jin,Been Yih, Field effect transistor and method of fabrication.
  7. Radosavljevic, Marko; Datta, Suman; Doyle, Brian S.; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Majumdar, Amian; Chau, Robert S., Field effect transistor with metal source/drain regions.
  8. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  9. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  10. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  11. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  12. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  13. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  14. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  15. Krivokapic, Zoran; Holbrook, Allison; Cherian, Sunny; Yang, Kai, Fully depleted SOI device with tungsten damascene contacts and method of forming same.
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  17. Chang, Peter L. D.; Doyle, Brian S., Independently accessed double-gate and tri-gate transistors in same process flow.
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  19. Park, Heemyong; Assaderaghi, Fariborz; Mandelman, Jack A.; Shahidi, Ghavam G.; Wagner, Jr., Lawrence F., Integrated circuits with reduced substrate capacitance.
  20. Abbott,Todd R.; Wang,Zhongze; Trivedi,Jigish D.; Cho,Chih Chen, Integrated transistor circuitry.
  21. Brown, Jeffrey Scott; Bryant, Andres; Gauthier, Jr., Robert J.; Mann, Randy William; Voldman, Steven Howard, Method and structures for dual depth oxygen layers in silicon-on-insulator processes.
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  23. Brask, Justin K.; Chau, Robert S.; Datta, Suman; Doczy, Mark L.; Doyle, Brian S.; Kavalieros, Jack T.; Majumdar, Amlan; Metz, Matthew V.; Radosavljevic, Marko, Method for fabricating transistor with thinned channel.
  24. Brask, Justin K.; Chau, Robert S.; Datta, Suman; Doczy, Mark L.; Doyle, Brian S.; Kavalieros, Jack T.; Majumdar, Amlan; Metz, Matthew V.; Radosavljevic, Marko, Method for fabricating transistor with thinned channel.
  25. Bin Yu, Method of forming a double gate transistor having an epitaxial silicon/germanium channel region.
  26. Abbott, Todd R.; Wang, Zhongze; Trivedi, Jigish D.; Cho, Chih-Chen, Method of forming a field effect transistor.
  27. Abbott,Todd R.; Wang,Zhongze; Trivedi,Jigish D.; Cho,Chih Chen, Method of forming a field effect transistor.
  28. Tang, Sanh D.; Violette, Michael P.; Burke, Robert, Method of forming a field effect transistor.
  29. Tang,Sanh D.; Violette,Michael P.; Burke,Robert, Method of forming a field effect transistor.
  30. Tang,Sanh D.; Violette,Michael P.; Burke,Robert, Method of forming a field effect transistor.
  31. Tang, Sanh D.; Violette, Michael P.; Burke, Robert, Method of forming a field effect transistor having source/drain material over insulative material.
  32. Abbott,Todd R.; Wang,Zhongze; Trivedi,Jigish D.; Cho,Chih Chen, Method of forming a field effect transistor with halo implant regions.
  33. Tang, Sanh D.; Violette, Michael P.; Burke, Robert, Method of forming field effect transistors.
  34. Kumauchi, Takahiro; Yoshida, Makoto; Kajigaya, Kazuhiko, Method of manufacturing a semiconductor integrated circuit device.
  35. Brask, Justin K.; Doyle, Brian S.; Shah, Uday; Chau, Robert S., Method of patterning a film.
  36. Tang,Sanh D.; Violette,Michael P.; Burke,Robert, Methods of forming a field effect transistor having source/drain material over insulative material.
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  38. Enda, Toshiyuki; Tanimoto, Hiroyoshi; Kusunoki, Naoki; Aoki, Nobutoshi; Arai, Fumitaka; Shirota, Riichiro, Non-volatile semiconductor memory and method for controlling a non-volatile semiconductor memory.
  39. Enda, Toshiyuki; Tanimoto, Hiroyoshi; Kusunoki, Naoki; Aoki, Nobutoshi; Arai, Fumitaka; Shirota, Riichiro, Non-volatile semiconductor memory and method for controlling a non-volatile semiconductor memory.
  40. Shah, Uday; Doyle, Brian S.; Brask, Justin K.; Chau, Robert S.; Letson, Thomas A., Nonplanar device with thinned lower body portion and method of fabrication.
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  51. Haddad, Nadim; Brady, Frederick; Maimon, Jonathon, Radiation-tolerant integrated circuit device and method for fabricating.
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  63. Rakshit, Titash; Giles, Martin; Pillarisetty, Ravi; Kavalieros, Jack T., Stress in trigate devices using complimentary gate fill materials.
  64. Hareland, Scott A.; Chau, Robert S.; Doyle, Brian S.; Datta, Suman; Jin, Been-Yih, Tri-gate transistor device with stress incorporation layer and method of fabrication.
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