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Segmented substrate for improved ARC-JET diamond deposition

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/50
  • C23C-016/00
출원번호 US-0473197 (1995-06-07)
발명자 / 주소
  • Patten
  • Jr. Donald O.
  • Guarnaccia David G.
  • Fryburg George A.
출원인 / 주소
  • Saint-Gobain/Norton Industrial Ceramics Corporation
대리인 / 주소
    Ulbrich
인용정보 피인용 횟수 : 23  인용 특허 : 9

초록

A mandrel for use in a diamond deposition process for generating free standing diamond films has a segmented surface forming a plurality of surfaces for deposition of diamond. The segmented surface is formed of a plurality of mesa segments on a common supporting base surfaces for the mesas. The mesa

대표청구항

[ We claim:] [1.] An apparatus for making free-standing diamond film, comprising:a mandrel having a base plate and a plurality of spaced mesa deposition surfaces,said mandrel including mesa segments on which said mesa deposition surfaces are located, said mesa segments being removably attached to sa

이 특허에 인용된 특허 (9)

  1. Kosky Philip G. (Schenectady NY) Slutz David E. (Columbus OH) Knemeyer Friedel S. (Granville OH), Apparatus for chemical vapor deposition of diamond including graphite substrate holders.
  2. Sussman Ricardo S. (3 Frobisher Gardens Guildford ; Surrey ; GU1 2NT GB2), Apparatus for depositing a material on a substrate by chemical vapor deposition.
  3. Enniss Dan O. (Sandy UT) Simpson Matthew (Sudbury MA), Apparatus for depositing a substance on a rotating surface.
  4. Cann Gordon L. (Laguna Beach CA) Shepard ; Jr. Cecil B. (Laguna Beach CA) McKevitt Frank X. (Anaheim Hills CA), Apparatus for plasma deposition.
  5. Gasworth Steven M. (Glenville NY), Apparatus for producing diamonds by chemical vapor deposition and articles produced therefrom.
  6. Anthony Thomas R. (Schenectady NY) Banholzer William F. (Scotia NY) Ettinger Robert H. (Schenectady NY) Fleischer James F. (Scotia NY), CVD diamond for coating twist drills.
  7. Cann Gordon L. (Laguna Beach CA) Shepard ; Jr. Cecil B. (Laguna Beach CA), Method for plasma jet deposition.
  8. Brandolf Henry E. (Inver Grove Heights MN), Planetary substrate support apparatus for vapor vacuum deposition coating.
  9. Chosa Munehiro (Sodegaura JPX), Suscepter device for the preparation of a diamond film-coated body.

이 특허를 인용한 특허 (23)

  1. Fellbaum, Randy D.; Ulbrich, Volker R., Apparatus and method for making free standing diamond.
  2. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
  3. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  4. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  5. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  6. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
  7. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  8. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
  9. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
  10. Franz,David; Karner,Johann, Method for diamond coating substrates.
  11. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
  12. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
  13. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
  14. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
  15. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
  16. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
  17. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
  18. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
  19. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
  20. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
  21. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
  22. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
  23. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
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