초록 ▼

An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then

An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.

대표청구항 ▼

[ We claim:] [1.] A method for removing a gas from a liquid comprising:passing said liquid through a structure permeable to said gas, said structure being subjected to a pressure differential across the walls of said structure; andpassing said liquid through a liquid mass flow controller, said passa

[ We claim:] [1.] A method for removing a gas from a liquid comprising:passing said liquid through a structure permeable to said gas, said structure being subjected to a pressure differential across the walls of said structure; andpassing said liquid through a liquid mass flow controller, said passage through said structure inhibiting formation of bubbles of said gas and thereby improving the accuracy of said liquid mass flow controller.