초록 ▼

Apparatus having a plurality of temperature sensors (probes) positioned at a number of locations upon a platform such as a placebo or dummy wafer and a method of fabricating and using the apparatus. The temperature sensors are photoemissive temperature sensors. To fabricate each of the photoemissive

Apparatus having a plurality of temperature sensors (probes) positioned at a number of locations upon a platform such as a placebo or dummy wafer and a method of fabricating and using the apparatus. The temperature sensors are photoemissive temperature sensors. To fabricate each of the photoemissive sensors, a thermally conductive epoxy is placed in a mound at each sensor location upon the platform. Upon one side of this mound, a coating of phosphorous material is applied. One end of a fiber optic cable abuts the phosphor material, and a an encapsulation layer such as a polyimide tape is positioned atop the conductive epoxy and the fiber optic cable such that the fiber optic cable is maintained in a stationary position relative to the phosphor material to obtain a local temperature of the wafer surface.

대표청구항 ▼

[ What is claimed is:] [1.] Apparatus for measuring temperature comprising:a placebo wafer; anda plurality of luminescent temperature probes affixed to a surface of said placebo wafer wherein each of said luminescent temperature probes further comprises a mound of thermally conductive material, form

[ What is claimed is:] [1.] Apparatus for measuring temperature comprising:a placebo wafer; anda plurality of luminescent temperature probes affixed to a surface of said placebo wafer wherein each of said luminescent temperature probes further comprises a mound of thermally conductive material, formed upon a surface of said placebo wafer, having a portion thereof coated with a phosphor material, a fiber optic cable, having an end affixed to said placebo wafer and abutting said phosphor material to receive light produced by fluorescence of said phosphor material and an encapsulation layer, affixed to said fiber optic cable and said mound, for encapsulating said end of said fiber optic cable, said mound and said phosphor material.