초록 ▼

Methods for making Cr-Me sputter targets wherein Me is a metal are disclosed. Preferably Me is a transition metal and most preferably is a member selected from the group consisting of Cu, Fe, and V. As a first step in the method, Cr and Me powder or crystals on the order of less than 100 mesh are pr

Methods for making Cr-Me sputter targets wherein Me is a metal are disclosed. Preferably Me is a transition metal and most preferably is a member selected from the group consisting of Cu, Fe, and V. As a first step in the method, Cr and Me powder or crystals on the order of less than 100 mesh are provided. Preferably, the powders or crystals have a size of about 6-8 mesh. The Cr is present in a weight ratio amount of at least 50% Cr based upon the total combined weight of Cr and Me present. The Cr and Me components are then mechanically alloyed in a high energy ball mill or the like so as to provide an intimate mixture of powdered Cr-Me. The resulting powder is screened with, for example, a -20 -70 mesh screen, and then subjected to hot isostatic pressing (HIP) conditions to consolidate the powders at pressures of about 10,000 to 45,000 psi and temperatures of 800.degree. C. to 1500.degree. C. for about 1/4 to 5 hours. The HIP can is then opened, and the resulting consolidated mass or billet is cut and machined into the desired target size and shape.

대표청구항 ▼

[ What is claimed is:] [1.] A method for making a Cr-Me containing sputter target comprising:(a) providing a blend including Cr powder of less than 100 mesh and Me powder of less than 100 mesh wherein Me is a metal;(b) mechanically alloying said blend of particles;(c) subjecting said mechanically al

[ What is claimed is:] [1.] A method for making a Cr-Me containing sputter target comprising:(a) providing a blend including Cr powder of less than 100 mesh and Me powder of less than 100 mesh wherein Me is a metal;(b) mechanically alloying said blend of particles;(c) subjecting said mechanically alloyed blend to hot isostatic pressure conditions to consolidate said mechanically alloyed blend;(d) shaping said consolidated mechanically alloyed blend to a shape desired for use as a sputter target.