초록

The present invention provides a method for strongly adhering a diamond-like carbon coating to a metal alloy substrate using ion beam assisted deposition of silicon and/or germanium followed by ion beam assisted deposition of diamond-like carbon.

대표청구항 ▼

[ We claim:] [1.] A method for coating an outer surface of a metal alloy substrate with diamond-like carbon comprising:exposing said metal alloy substrate to a vacuum of at least about 10.sup.-5 torr;heating said substrate to a first temperature of about 300.degree. C. (149.degree. F.) or, if said m

[ We claim:] [1.] A method for coating an outer surface of a metal alloy substrate with diamond-like carbon comprising:exposing said metal alloy substrate to a vacuum of at least about 10.sup.-5 torr;heating said substrate to a first temperature of about 300.degree. C. (149.degree. F.) or, if said metal alloy is temperature sensitive, to a highest temperature acceptable for said metal alloy;depositing an intermediate material selected from the group consisting of silicon and germanium onto said substrate in an amount sufficient to form an intermetallic bonding layer at said outer surface of said substrate cohesively bonded to an outer interlayer of said intermediate material;substantially simultaneously bombarding said intermediate material with a first energetic beam of ions at a first energy, a first ion arrival ratio, and for a first amount of time sufficient to form said intermetallic bonding layer cohesively bonded to said interlayer;condensing a diamond-like carbon precursor onto said interlayer at a second temperature and for a second amount of time sufficient to form a film of precursor molecules on said interlayer;substantially simultaneously bombarding said diamond-like carbon precursor with a second energetic beam of ions at a second energy, a second ion arrival ratio, and for a third amount of time sufficient to form a carbide bonding layer cohesively bonded to a coating of diamond-like carbon.