초록 ▼

A method of cleaning wafer surfaces includes providing a wafer surface and cleaning the wafer surface using at least hydrofluoric acid (HF) and an etch reducing component. The etch reducing component is from the group of (R).sub.4 NOH wherein R=(C.sub.1 -C.sub.20)alkyls, either straight or branch ch

A method of cleaning wafer surfaces includes providing a wafer surface and cleaning the wafer surface using at least hydrofluoric acid (HF) and an etch reducing component. The etch reducing component is from the group of (R).sub.4 NOH wherein R=(C.sub.1 -C.sub.20)alkyls, either straight or branch chained, and further wherein each R is independently a (C.sub.1 -C.sub.20)alkyl, preferably a (C.sub.1 -C.sub.4)alkyl, and more preferably one of tetra ethyl ammonium hydroxide (TEAH) and tetra methyl ammonium hydroxide (TMAH). A cleaning solution for use in cleaning a wafer surface includes an H.sub.2 O diluted HF solution and an etch reducing component from the group above, preferably, TMAH. A system for performing an HF vapor cleaning process includes a vapor chamber for positioning a wafer having a wafer surface and means for providing an HF vapor to the vapor chamber. The HF vapor includes an inert carrier gas, an HF component, one of a water vapor or an alcohol vapor, and an etch reducing component. The etch reducing component may be from the group above, preferably, TMAH.

대표청구항 ▼

[ What is claimed is:] [1.] A method of cleaning wafer surfaces, the method comprising the steps of:providing a wafer surface; andcleaning the wafer surface using a solution comprising at least hydrofluoric acid (HF) and an etch reducing component, the etch reducing component being from the group of

[ What is claimed is:] [1.] A method of cleaning wafer surfaces, the method comprising the steps of:providing a wafer surface; andcleaning the wafer surface using a solution comprising at least hydrofluoric acid (HF) and an etch reducing component, the etch reducing component being from the group of (R).sub.4 NOH wherein R=(C.sub.1 -C.sub.20)alkyls, either straight or branch chained, and further wherein each R is independently a (C.sub.1 -C.sub.20)alkyl.