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3-dimensional micromachining with femtosecond laser pulses 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23K-026/06
출원번호 US-0874775 (1997-06-13)
발명자 / 주소
  • Tatah Abdelkrim
  • Fukumoto Akira
출원인 / 주소
  • Panasonic Technologies, Inc.
대리인 / 주소
    Ratner & Prestia
인용정보 피인용 횟수 : 135  인용 특허 : 0

초록 ▼

A method of treating a material by generating an ultraviolet wavelength laser beam having femtosecond pulses; splitting the ultraviolet wavelength laser beam into a plurality of separate laser beams having femtosecond pulses; directing the separate laser beams onto a target point within a sample suc

대표청구항 ▼

[ What is claimed:] [1.] A method of treating a material comprising the steps of:(a) generating at least four beams having femtosecond pulses, said beams individually having an intensity below a damage threshold intensity of said material;(b) directing said beams onto a target point within said mate

이 특허를 인용한 특허 (135)

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