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An exhaust system for a film forming apparatus including an exhaust pipe passage connected to an exhaust port of the film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound. The film forming apparatus includes a pressure transfer unit provided for th

An exhaust system for a film forming apparatus including an exhaust pipe passage connected to an exhaust port of the film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound. The film forming apparatus includes a pressure transfer unit provided for the exhaust pipe passage and arranged to transfer, through the exhaust pipe passage, gas in the film forming apparatus as exhaust gas. A cooling mechanism is provided for the pressure transfer unit and arranged to cool the pressure transfer unit to a temperature lower than a temperature, at which the organic metal compound is decomposed, so as to prevent precipitation of the organic metal compound contained in the exhaust gas introduced into the pressure transfer unit. A removing unit is disposed at an intermediate position of the exhaust pipe passage, downstream from the pressure transfer unit, so as to remove the organic metal compound contained in the exhaust gas which is introduced through the exhaust pipe passage.

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[ We claim:] [1.] An exhaust system for a film forming apparatus comprising:an exhaust pipe passage connected to an exhaust port of said film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound;pressure transfer means provided for said exhaust pipe pa

[ We claim:] [1.] An exhaust system for a film forming apparatus comprising:an exhaust pipe passage connected to an exhaust port of said film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound;pressure transfer means provided for said exhaust pipe passage and arranged to transfer, through said exhaust pipe passage, gas in said film forming apparatus as exhaust gas;cooling means provided for said pressure transfer means and arranged to cool said pressure transfer means to a temperature lower than a temperature, at which the organic metal compound is decomposed, so as to prevent precipitation of the organic metal compound contained in the exhaust gas introduced into said pressure transfer means; anddeleterious-material removing means disposed at an intermediate position of said exhaust pipe passage downstream from said pressure transfer means so as to remove the organic metal compound contained in the exhaust gas which is introduced through said exhaust pipe passage. [18.] A method of exhausting gas in a film forming apparatus comprising the steps of:sucking gas containing organic metal compounds from said film forming apparatus;allowing the gas to flow to a deleterious-material removing means through an exhaust pipe passage while preventing precipitation of the organic metal compound in the gas; andcausing said deleterious-material removing means to remove the organic metal compound contained in the gas.