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Single laser bright field and dark field system for detecting anomalies of a sample 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-021/00
출원번호 US-0611109 (1996-03-05)
발명자 / 주소
  • Vaez-Iravani Mehdi
출원인 / 주소
  • Kla-Tencor Corporation
대리인 / 주소
    Majestic, Parsons, Siebert & Hsue
인용정보 피인용 횟수 : 144  인용 특허 : 0

초록 ▼

A single laser is used to provide light for both dark and bright field detection. The laser beam is split into two beams by a Wollaston prism and both beams are directed towards a sample to be inspected to illuminate two areas of the sample. The light reflected by or transmitted through the sample a

대표청구항 ▼

[ What is claimed is:] [1.] A system for detecting anomalies of a sample, comprising:means for transmitting to said sample two substantially parallel optical incident beams, said beams being initially coherent but of different polarizations, so that portions of the beams are reflected or transmitted

이 특허를 인용한 특허 (144)

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