초록 ▼

A thermal cycling module includes an array of thermoelectric devices [36] divided into multiple zones [A, B, C, D] independently controlled by corresponding variable power supplies [56, 58, 60, 62]. The thermoelectric devices [36] provide localized, precise, and rapid control of both heating and coo

A thermal cycling module includes an array of thermoelectric devices [36] divided into multiple zones [A, B, C, D] independently controlled by corresponding variable power supplies [56, 58, 60, 62]. The thermoelectric devices [36] provide localized, precise, and rapid control of both heating and cooling, while fluid from one of several fluid supplies [64, 66, 68] provides bulk heating or cooling via a fluid heat exchanger [38]. Sensors [46, 48, 50, 52] provide feedback of temperature or other process parameters to a controller [54] which generates control signals for controlling the power supplies [56, 58, 60, 62], the fluid supplies [64, 66, 68], and fluid valves [70, 72] which control fluid flow through the heat exchanger [38].

대표청구항 ▼

[ What is claimed is:] [44.] A method for processing a substrate through a thermal cycle, the method comprising the following steps:a) transferring heat between the substrate and a thermoelectric device;b) exchanging heat between the substrate and a fluid heat exchanger;c) changing relative flows of

[ What is claimed is:] [44.] A method for processing a substrate through a thermal cycle, the method comprising the following steps:a) transferring heat between the substrate and a thermoelectric device;b) exchanging heat between the substrate and a fluid heat exchanger;c) changing relative flows of a plurality of fluids through the fluid heat exchanger, wherein the fluids have differing temperatures;d) calculating a control signal based on a desired process parameter; ande) changing a flow of electric current through the thermoelectric device in accordance with the control signal.