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Method of forming diamond devices having textured and highly oriented diamond layers therein

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-029/04
출원번호 US-0457388 (1995-05-31)
발명자 / 주소
  • Plano Linda S.
  • Stoner Brian R.
출원인 / 주소
  • Kobe Steel USA Inc.
대리인 / 주소
    Myers, Bigel, Sibley & Sajovec
인용정보 피인용 횟수 : 35  인용 특허 : 23

초록

A method of forming devices having textured and highly oriented diamond layers includes the steps of forming a plurality of diamond nucleation sites on a substrate and then growing diamond on the sites so merge and form a continuous diamond layer having {100} and {111} facets. The growing step is pe

대표청구항

[ That which is claimed is:] [10.] A method of forming a diamond layer on a semiconductor substrate, comprising the steps of:forming a first diamond layer, having {100} and {111} facets at an exposed face thereof, by growing diamond on the substrate using first growth parameters which favor growth o

이 특허에 인용된 특허 (23)

  1. Kalyankjumar Das (Raleigh NC) Dreifus David L. (Cary NC) Tessmer Alison J. (Cary NC) Venkatesan Vasudev (Raleigh NC), Diamond field-effect transistor with a particular boron distribution profile.
  2. Kobashi Koji (Nishinomiya NC JPX) Miyata Koichi (Raleigh NC) Kumagai Kazuo (Kobe JPX) Inoue Takayoshi (Kobe JPX) Tachibana Hiroyuki (Tsukuba JPX) Nakaue Akimitsu (Kobe JPX), Diamond film thermistor.
  3. Das Kalyankumar (Raleigh NC), Diamond rectifying contact with undoped diamond layer.
  4. Yamazaki Shunpei (Tokyo JPX), Diamond thermistor and manufacturing method for the same.
  5. Garg Diwakar (Macungie PA) Tsai Wilman (Cupertino CA) Iampietro Robert L. (Emmaus PA) Kimock Fred M. (Macungie PA) Dyer Paul N. (Allentown PA), Diamond-on-a-substrate for electronic applications.
  6. Dreifus David L. (Cary NC), Double diamond mesa vertical field effect transistor.
  7. Garg Diwakar (Macungie PA) Tsai Wilman (Cupertino CA) Kimock Fred M. (Macungie PA) Iampietro Robert L. (Emmaus PA) Dyer Paul N. (Allentown PA), HFCVD method for producing thick, adherent and coherent polycrystalline diamonds films.
  8. Humphreys Trevor P. (Raleigh NC) Nemanich Robert J. (Cary NC) Das Kalyankumar (Raleigh NC), High temperature rectifying contact.
  9. Miyata Koichi (Kobe JPX) Saito Kimitsugu (Kobe NC JPX) Dreifus David L. (Cary NC) Stoner Brian R. (Raleigh NC), Highly oriented diamond film field-effect transistor.
  10. Garg Diwakar (Macungie PA) Lynn Sui-Yuan (Macungie PA) Iampietro Robert L. (Emmaus PA) Wrecsics Ernest L. (Bethlehem PA) Dyer Paul N. (Allentown PA), Hot filament CVD of thick, adherent and coherent polycrystalline diamond films.
  11. Garg Diwakar (Macungie PA) Lynn Sui-Yuan (Macungie PA) Iampietro Robert L. (Emmaus PA) Wrecsics Ernest L. (Bethlehem PA) Dyer Paul N. (Allentown PA), Interrupted method for producing multilayered polycrystalline diamond films.
  12. Kumagai Kazuo (Kobe NC JPX) Miyata Koichi (Raleigh NC) Miyauchi Shigeaki (Kobe JPX) Matsui Yuichi (Kobe JPX) Kobashi Koji (Nishinomiya JPX), MIS type diamond field-effect transistor with a diamond insulator undercoat.
  13. Yang Peichun (Raleigh NC) Zhu Wei (Raleigh NC) Glass Jeffrey T. (Apex NC), Method for fabricating diamond films on nondiamond substrates and related structures.
  14. Koyama Hisashi (Kobe JPX) Miyata Koichi (Kobe JPX) Kobashi Koji (Kobe JPX), Method for forming boron-doped semiconducting diamond films.
  15. Kobashi Koji (Kobe JPX) Miyauchi Shigeaki (Kobe JPX) Nishimura Kozo (Kobe JPX) Kumagai Kazuo (Kobe JPX) Kato Rie (Kobe JPX), Method for forming diamond films by vapor phase synthesis.
  16. Narayan Jagdish (Raleigh NC), Method for synthesis and processing of continuous monocrystalline diamond thin films.
  17. Matsukawa Naoki (Chiba JPX) Mizuno Makoto (Chiba JPX) Shimazu Katsuhiro (Chiba JPX), Method of manufacturing a semiconductor device forming a high concentration impurity region through a CVD insulating fil.
  18. Yamazaki Shunpei (Tokyo JPX), Method of manufacturing diamond thermistors.
  19. Stoner Brian R. (Raleigh NC) Glass Jeffrey T. (Apex NC) Hooke William M. (Chapel Hill NC) Williams Bradley E. (Worthington OH), Nucleation enhancement for chemical vapor deposition of diamond.
  20. Tessmer Alison J. (Cary NC) Dreifus David L. (Cary NC), Process for making substantially smooth diamond.
  21. Inoue Takayoshi (Kobe JPX) Tachibana Hiroyuki (Kobe JPX) Nakaue Akimitsu (Kobe JPX) Kumagai Kazuo (Kobe JPX) Miyata Koichi (Kobe JPX) Kobashi Koji (Nishinomiya JPX), Process for the selective deposition of thin diamond film by gas phase synthesis.
  22. Miyata Koichi (Raleigh NC) Kumagai Kazuo (Kobe JPX) Kobashi Koji (Nishinomiya JPX) Matsui Yuichi (Kobe JPX) Nakaue Akimitsu (Kobe JPX), Schottky diode manufacturing process employing the synthesis of a polycrystalline diamond thin film.
  23. Fujimori Naoji (c/o Itami Works of Sumitomo Electric Industries ; Ltd. ; 1-1 ; Koyakita 1-chome Itami-shi ; Hyogo-ken JPX) Imai Takahiro (c/o Itami Works of Sumitomo Electric Industries ; Ltd. ; 1-1 , Thermistor and method for producing the same.

이 특허를 인용한 특허 (35)

  1. Linares, Robert C.; Doering, Patrick J., Boron doped single crystal diamond electrochemical synthesis electrode.
  2. Meguro, Kiichi; Yamamoto, Yoshiyuki; Imai, Takahiro, Diamond composite substrate and process for producing the same.
  3. Kazahaya, Katsuo; Kawai, Shigetaka; Matsumoto, Yasushi; Ishibashi, Keiji; Imai, Takahiro, Diamond film coated tool and process for producing the same.
  4. Meguro,Kiichi; Yamamoto,Yoshiyuki; Imai,Takahiro, Diamond single crystal composite substrate and method for manufacturing the same.
  5. Fernihough,John, Directionally solidified columnar grained article and apparatus for manufacture thereof.
  6. Wort, Christopher John Howard; Scarsbrook, Geoffrey Alan; Friel, Ian; Balmer, Richard Stuart, Electronic field effect devices.
  7. Wort, Christopher John Howard; Scarsbrook, Geoffrey Alan; Friel, Ian; Balmer, Richard Stuart, Electronic field effect devices and methods for their manufacture.
  8. Wort, Christopher John Howard; Scarsbrook, Geoffrey Alan; Friel, Ian; Balmer, Richard Stuart, Electronic field effect devices and methods for their manufacture.
  9. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S.; Thomas, Kurt, Faucet.
  10. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  11. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  12. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  13. Brondum, Klaus, Faucet with wear-resistant valve component.
  14. Jerry W. Zimmer ; Daniel A. Worsham, Formation of diamond particle interconnects.
  15. Richard, David; Bourban, Stewes, Functional micromechanical assembly.
  16. Scarsbrook, Geoffrey Alan, High uniformity boron doped diamond material.
  17. Berger, Franz; Burtsche, Daniel; Meyer, Jürgen; Schreiner, Sven, Method for fixing a connecting element on a workpiece and component comprising a workpiece with a connecting element fixed on it.
  18. Linares,Robert C.; Doering,Patrick J., Method of forming an N-type doped single crystal diamond.
  19. Linares, Robert C.; Doering, Patrick J., Method of growing single crystal diamond in a plasma reactor.
  20. Chouquet, Caroline; Ducros, Cédric; Sanchette, Frédéric, Method of producing a hydrogenated amorphous carbon coating.
  21. Lee, Chee-Leong; Gu, Erdan; Scarsbrook, Geoffrey Alan; Friel, Ian; Dawson, Martin David, Plasma etching of diamond surfaces.
  22. Lee, Chee-Leong; Gu, Erdan; Scarsbrook, Geoffrey Alan; Friel, Ian; Dawson, Martin David, Plasma etching of diamond surfaces.
  23. Doering, Patrick J.; Linares, Robert C.; Novak, Alicia E.; Abrahams, John M.; Murray, Michael, Single crystal diamond electrochemical electrode.
  24. Linares, Robert C.; Doering, Patrick J, Single crystal diamond having C, C, and phosphorous.
  25. Scarsbrook, Geoffrey Alan; Martineau, Philip Maurice; Collins, John Lloyd; Sussmann, Ricardo Simon; Dorn, Bärbel Susanne Charlotte; Whitehead, Andrew John; Twitchen, Daniel James, Single crystal diamond prepared by CVD.
  26. Scarsbrook, Geoffrey Alan; Martineau, Philip Maurice; Collins, John Lloyd; Sussmann, Ricardo Simon; Dorn, Bärbel Susanne Charlotte; Whitehead, Andrew John; Twitchen, Daniel James, Single crystal diamond prepared by CVD.
  27. Linares,Robert C.; Doering,Patrick J., Single crystal diamond tool.
  28. Randy S. Cannon ; Kevin G. Graham, Synthetic gasket material.
  29. Linares, Robert C.; Doering, Patrick J., System and method for producing synthetic diamond.
  30. Linares,Robert C.; Doering,Patrick J., System and method for producing synthetic diamond.
  31. Gaul, Stephen J; Voldman, Steven Howard; Tschann, Jean-Michel, Thermal matching in semiconductor devices using heat distribution structures.
  32. Linares, Robert C.; Doering, Patrick J., Tunable CVD diamond structures.
  33. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
  34. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
  35. Saxler, Adam William, Wide bandgap device having a buffer layer disposed over a diamond substrate.
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