초록 ▼

An apparatus for the spin coating of substrates including a substrate carrier, a motor for rotating the substrate carrier, and a spinning bowl surrounding the substrate carrier. A lid is also provided in this spin coating apparatus which at least partially covers the spinning bowl for diminishing th

An apparatus for the spin coating of substrates including a substrate carrier, a motor for rotating the substrate carrier, and a spinning bowl surrounding the substrate carrier. A lid is also provided in this spin coating apparatus which at least partially covers the spinning bowl for diminishing the escape for fumes into the ambient atmosphere during the spin coating of a substrate carried by the substrate carrier. The lid is also designed for improving the air flow around the substrate carried by the substrate carrier during the spin coating of the substrate.

대표청구항 ▼

[ We claim:] [1.] An apparatus for the spin coating of substrates comprising:means for carrying a substrate;motor means for rotating said substrate carrier means;a spinning bowl surrounding said substrate carrier means; anda lid member at least partially covering said spinning bowl for diminishing t

[ We claim:] [1.] An apparatus for the spin coating of substrates comprising:means for carrying a substrate;motor means for rotating said substrate carrier means;a spinning bowl surrounding said substrate carrier means; anda lid member at least partially covering said spinning bowl for diminishing the escape of fumes into the ambient atmosphere during the spin coating of a substrate carried by said substrate carrier means wherein said lid member comprises two semi-circular portions having semi-circular openings therein which are pivotally mounted on a support post and are movable between an opened position, wherein said semi-circular portions are moved away from each other to expose said spinning bowl, and a closed position, wherein said semi-circular portions are moved into alignment with each other such that said semi-circular openings form an aperture which thereby modifies air flow through said spinning bowl and prevents toxic fumes from escaping out of said spinning bowl.