초록 ▼

An alignment method for achieving accurate alignment by accurately eliminating an isolated area with a large nonlinear component of an alignment error from sample areas. A conversion parameter is calculated by statistical processing on the basis of a result obtained by measuring the position of each

An alignment method for achieving accurate alignment by accurately eliminating an isolated area with a large nonlinear component of an alignment error from sample areas. A conversion parameter is calculated by statistical processing on the basis of a result obtained by measuring the position of each sample area on a substrate to be processed in advance, and each area on the substrate is aligned on the basis of arrangement coordinate values calculated using the conversion parameter. This method relates to a method of aligning each of a plurality of areas to be processed arranged on the substrate on the basis of arrangement coordinates on a first coordinate system (x, y) set on the substrate to a predetermined process position in a second coordinate system (X, Y) for defining the moving position of the substrate.

대표청구항 ▼

[ What is claimed is:] [1.] A method of aligning each of a plurality of areas on a substrate to a predetermined position in a coordinate system for defining a moving position of said substrate, comprising:a first step of measuring coordinate positions, on the coordinate system, of N (N is an integer

[ What is claimed is:] [1.] A method of aligning each of a plurality of areas on a substrate to a predetermined position in a coordinate system for defining a moving position of said substrate, comprising:a first step of measuring coordinate positions, on the coordinate system, of N (N is an integer not less than 2) sample areas selected from the plurality of areas;a second step of calculating nonlinear deviation amounts of the coordinate positions of the N sample areas on the basis of the coordinate positions measured in the first step;a third step of calculating nonlinear deviation amounts of coordinate positions of (N-1) sample areas, obtained by rejecting one sample area from the N sample areas, on the basis of the coordinate positions measured in the first step; anda fourth step of rejecting said one sample area from the plural sample areas for calculating coordinate positions, on the coordinate system, of each of plural sample areas when the variation of said (N-1) nonlinear deviation amounts calculated in the third step is smaller than the variation of said (N) nonlinear deviation amounts calculated in the second step.